X-LRQ-SV2 Series
High vacuum motorized linear stages with built-in controllers
Series Specifications
Download Datasheet| Built-in Controller |  |
| Travel Range | 75 – 600 mm |
| Manual Control |  |
| Axes of Motion | 1 |
| LED Indicators | |
| Weight | 2.27 – 4.86 kg |
| Accuracy (unidirectional) | 15 – 150 µm |
| Repeatability | < 2.5 µm (< 0.000098") |
| Backlash | < 8 – < 21 µm |
| Flatness of Travel | < 20 – < 75 µm |
| Straightness of Travel | < 20 – < 60 µm |
| Pitch Error | 0.025 – 0.045° |
| Roll Error | 0.01 – 0.035° |
| Yaw Error | 0.02 – 0.04° |
| Microstep Size (Default Resolution) | 0.09921875 – 0.49609375 µm |
| Default Resolution | 1/64 of a step |
| Peak Thrust | 60 – 100 N |
| Maximum Continuous Thrust | 60 – 100 N |
| Maximum Centered Load | 1000 N (224.3 lb) |
| Maximum Moment (Pitch) | 30 N⋅m (22.1 lb⋅ft) |
| Maximum Moment (Roll) | 30 N⋅m (22.14 lb⋅ft) |
| Maximum Moment (Yaw) | 30 N⋅m (22.14 lb⋅ft) |
| Stiffness (Pitch) | 500 N⋅m/° (35 µrad/N⋅m) |
| Stiffness (Roll) | 1180 N⋅m/° (15 µrad/N⋅m) |
| Stiffness (Yaw) | 450 N⋅m/° (39 µrad/N⋅m) |
| Maximum Speed | 35 – 205 mm/s |
| Minimum Speed | 0.000061 – 0.000303 mm/s |
| Speed Resolution | 0.000061 – 0.000303 mm/s |
| Limit or Home Sensing | Magnetic home sensor |
| Linear Motion Per Motor Rev | 1.27 – 6.35 mm |
| Motor Steps Per Rev | 200 |
| Motor Type | Stepper (2 phase) |
| Motor Rated Current | 2100 mA/phase |
| Motor Winding Inductance | 2.8 mH/phase |
| Communication Interface | RS-232 |
| Communication Protocol | Zaber ASCII (Default), Zaber Binary |
| Data Cable Connection | Teflon flying leads with M8 4 pin M/F |
| Power Supply | 24-48 VDC |
| Power Plug | None, use X-PIB |
| Maximum Current Draw | 1900 mA |
| Guide Type | Recirculating Ball Linear Guide |
| Mechanical Drive System | Precision lead screw |
| Mounting Interface | M6 and M3 threaded holes |
| Operating Temperature Range | 0 to 50 °C |
| CE Compliant | |
| Vacuum Compatible | High vacuum (10-6 Torr) |
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Part Specifications Comparison
| Part Number | Travel Range | Weight | Accuracy (unidirectional) | Backlash | Flatness of Travel | Straightness of Travel | Pitch Error | Roll Error | Yaw Error | Microstep Size (Default Resolution) | Peak Thrust | Maximum Continuous Thrust | Maximum Speed | Minimum Speed | Speed Resolution | Linear Motion Per Motor Rev |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| X-LRQ075AL-SV2 | 75 mm (2.953") | 2.27 kg (5.004 lb) | 23 µm (0.000906") | < 8 µm (< 0.000315") | < 20 µm (< 0.000787") | < 20 µm (< 0.000787") | 0.025° (0.436 mrad) | 0.01° (0.174 mrad) | 0.02° (0.349 mrad) | 0.09921875 µm | 100 N (22.4 lb) | 100 N (22.4 lb) | 35 mm/s (1.378"/s) | 0.000061 mm/s (0.000002"/s) | 0.000061 mm/s (0.000002"/s) | 1.27 mm (0.05") |
| X-LRQ075BL-SV2 | 75 mm (2.953") | 2.27 kg (5.004 lb) | 15 µm (0.000591") | < 21 µm (< 0.000827") | < 20 µm (< 0.000787") | < 20 µm (< 0.000787") | 0.025° (0.436 mrad) | 0.01° (0.174 mrad) | 0.02° (0.349 mrad) | 0.49609375 µm | 60 N (13.5 lb) | 60 N (13.5 lb) | 205 mm/s (8.071"/s) | 0.000303 mm/s (0.000012"/s) | 0.000303 mm/s (0.000012"/s) | 6.35 mm (0.25") |
| X-LRQ150AL-SV2 | 150 mm (5.905") | 2.64 kg (5.82 lb) | 45 µm (0.001772") | < 8 µm (< 0.000315") | < 25 µm (< 0.000984") | < 20 µm (< 0.000787") | 0.03° (0.523 mrad) | 0.015° (0.262 mrad) | 0.02° (0.349 mrad) | 0.09921875 µm | 100 N (22.4 lb) | 100 N (22.4 lb) | 35 mm/s (1.378"/s) | 0.000061 mm/s (0.000002"/s) | 0.000061 mm/s (0.000002"/s) | 1.27 mm (0.05") |
| X-LRQ150BL-SV2 | 150 mm (5.905") | 2.64 kg (5.82 lb) | 25 µm (0.000984") | < 21 µm (< 0.000827") | < 25 µm (< 0.000984") | < 20 µm (< 0.000787") | 0.03° (0.523 mrad) | 0.015° (0.262 mrad) | 0.02° (0.349 mrad) | 0.49609375 µm | 60 N (13.5 lb) | 60 N (13.5 lb) | 205 mm/s (8.071"/s) | 0.000303 mm/s (0.000012"/s) | 0.000303 mm/s (0.000012"/s) | 6.35 mm (0.25") |
| X-LRQ300AL-SV2 | 300 mm (11.811") | 3.4 kg (7.496 lb) | 90 µm (0.003543") | < 8 µm (< 0.000315") | < 35 µm (< 0.001378") | < 30 µm (< 0.001181") | 0.034° (0.593 mrad) | 0.015° (0.262 mrad) | 0.03° (0.523 mrad) | 0.09921875 µm | 100 N (22.4 lb) | 100 N (22.4 lb) | 35 mm/s (1.378"/s) | 0.000061 mm/s (0.000002"/s) | 0.000061 mm/s (0.000002"/s) | 1.27 mm (0.05") |
| X-LRQ300BL-SV2 | 300 mm (11.811") | 3.4 kg (7.496 lb) | 35 µm (0.001378") | < 21 µm (< 0.000827") | < 35 µm (< 0.001378") | < 30 µm (< 0.001181") | 0.034° (0.593 mrad) | 0.015° (0.262 mrad) | 0.03° (0.523 mrad) | 0.49609375 µm | 60 N (13.5 lb) | 60 N (13.5 lb) | 205 mm/s (8.071"/s) | 0.000303 mm/s (0.000012"/s) | 0.000303 mm/s (0.000012"/s) | 6.35 mm (0.25") |
| X-LRQ450AL-SV2 | 450 mm (17.716") | 4.15 kg (9.149 lb) | 135 µm (0.005315") | < 8 µm (< 0.000315") | < 45 µm (< 0.001772") | < 40 µm (< 0.001575") | 0.04° (0.698 mrad) | 0.025° (0.436 mrad) | 0.04° (0.698 mrad) | 0.09921875 µm | 100 N (22.4 lb) | 100 N (22.4 lb) | 35 mm/s (1.378"/s) | 0.000061 mm/s (0.000002"/s) | 0.000061 mm/s (0.000002"/s) | 1.27 mm (0.05") |
| X-LRQ450BL-SV2 | 450 mm (17.716") | 4.15 kg (9.149 lb) | 60 µm (0.002362") | < 21 µm (< 0.000827") | < 45 µm (< 0.001772") | < 40 µm (< 0.001575") | 0.04° (0.698 mrad) | 0.025° (0.436 mrad) | 0.04° (0.698 mrad) | 0.49609375 µm | 60 N (13.5 lb) | 60 N (13.5 lb) | 205 mm/s (8.071"/s) | 0.000303 mm/s (0.000012"/s) | 0.000303 mm/s (0.000012"/s) | 6.35 mm (0.25") |
| X-LRQ600AL-SV2 | 600 mm (23.622") | 4.86 kg (10.714 lb) | 150 µm (0.005905") | < 8 µm (< 0.000315") | < 75 µm (< 0.002953") | < 60 µm (< 0.002362") | 0.045° (0.785 mrad) | 0.035° (0.611 mrad) | 0.04° (0.698 mrad) | 0.09921875 µm | 100 N (22.4 lb) | 100 N (22.4 lb) | 35 mm/s (1.378"/s) | 0.000061 mm/s (0.000002"/s) | 0.000061 mm/s (0.000002"/s) | 1.27 mm (0.05") |
| X-LRQ600BL-SV2 | 600 mm (23.622") | 4.86 kg (10.714 lb) | 90 µm (0.003543") | < 21 µm (< 0.000827") | < 75 µm (< 0.002953") | < 60 µm (< 0.002362") | 0.045° (0.785 mrad) | 0.035° (0.611 mrad) | 0.04° (0.698 mrad) | 0.49609375 µm | 60 N (13.5 lb) | 60 N (13.5 lb) | 205 mm/s (8.071"/s) | 0.000303 mm/s (0.000012"/s) | 0.000303 mm/s (0.000012"/s) | 6.35 mm (0.25") |
Specification Charts & Notes
Thrust or torque is a function of speed. The values given above are maximums. These values cannot both be achieved simultaneously (i.e. at maximum speed, the unit will not produce maximum thrust).
Thrust Speed Performance
Duty Cycle
Bearing Lifetime
