X-LRQ-SV2 Series

High vacuum motorized linear stages with built-in controllers

Series Specifications

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Built-in Controller Yes
Repeatability < 2.5 µm (< 0.000098")
Communication Interface RS-232
Communication Protocol Zaber ASCII (Default), Zaber Binary
Data Cable Connection Teflon flying leads with M8 4 pin M/F
Maximum Centered Load 1000 N (224.3 lb)
Maximum Moment (Pitch) 30 N⋅m (22.1 lb⋅ft)
Maximum Moment (Roll) 30 N⋅m (22.14 lb⋅ft)
Maximum Moment (Yaw) 30 N⋅m (22.14 lb⋅ft)
Stiffness (Pitch) 500 N⋅m/° (35 µrad/N⋅m)
Stiffness (Roll) 1180 N⋅m/° (15 µrad/N⋅m)
Stiffness (Yaw) 450 N⋅m/° (39 µrad/N⋅m)
Power Supply 24-48 VDC
Power Plug None, use X-PIB
Maximum Current Draw 1900 mA
Motor Steps Per Rev 200
Motor Type Stepper (2 phase)
Motor Rated Current 2100 mA/phase
Motor Winding Inductance 2.8 mH/phase
Default Resolution 1/64 of a step
Guide Type Recirculating Ball Linear Guide
Mechanical Drive System Precision lead screw
Limit or Home Sensing Magnetic home sensor
Manual Control No
Axes of Motion 1
LED Indicators Yes
Mounting Interface M6 and M3 threaded holes
Operating Temperature Range 0 to 50 °C
CE Compliant Yes
Vacuum Compatible High vacuum (10-6 Torr)

Part Specifications Comparison

Part NumberMicrostep Size (Default Resolution)Travel RangeAccuracy (unidirectional)BacklashMaximum SpeedMinimum SpeedSpeed ResolutionPeak ThrustMaximum Continuous ThrustFlatness of TravelStraightness of TravelPitchRollYawLinear Motion Per Motor RevWeight
X-LRQ075AL-SV20.09921875 µm75 mm (2.953")23 µm (0.000906")< 8 µm (< 0.000315")35 mm/s (1.378"/s)0.000061 mm/s (0.000002"/s)0.000061 mm/s (0.000002"/s)100 N (22.4 lb)100 N (22.4 lb)< 20 µm (< 0.000787")< 20 µm (< 0.000787")0.025° (0.436 mrad)0.01° (0.174 mrad)0.02° (0.349 mrad)1.27 mm (0.05")2.27 kg (5.004 lb)
X-LRQ075BL-SV20.49609375 µm75 mm (2.953")15 µm (0.000591")< 21 µm (< 0.000827")205 mm/s (8.071"/s)0.000303 mm/s (0.000012"/s)0.000303 mm/s (0.000012"/s)60 N (13.5 lb)60 N (13.5 lb)< 20 µm (< 0.000787")< 20 µm (< 0.000787")0.025° (0.436 mrad)0.01° (0.174 mrad)0.02° (0.349 mrad)6.35 mm (0.25")2.27 kg (5.004 lb)
X-LRQ150AL-SV20.09921875 µm150 mm (5.905")45 µm (0.001772")< 8 µm (< 0.000315")35 mm/s (1.378"/s)0.000061 mm/s (0.000002"/s)0.000061 mm/s (0.000002"/s)100 N (22.4 lb)100 N (22.4 lb)< 25 µm (< 0.000984")< 20 µm (< 0.000787")0.03° (0.523 mrad)0.015° (0.262 mrad)0.02° (0.349 mrad)1.27 mm (0.05")2.64 kg (5.82 lb)
X-LRQ150BL-SV20.49609375 µm150 mm (5.905")25 µm (0.000984")< 21 µm (< 0.000827")205 mm/s (8.071"/s)0.000303 mm/s (0.000012"/s)0.000303 mm/s (0.000012"/s)60 N (13.5 lb)60 N (13.5 lb)< 25 µm (< 0.000984")< 20 µm (< 0.000787")0.03° (0.523 mrad)0.015° (0.262 mrad)0.02° (0.349 mrad)6.35 mm (0.25")2.64 kg (5.82 lb)
X-LRQ300AL-SV20.09921875 µm300 mm (11.811")90 µm (0.003543")< 8 µm (< 0.000315")35 mm/s (1.378"/s)0.000061 mm/s (0.000002"/s)0.000061 mm/s (0.000002"/s)100 N (22.4 lb)100 N (22.4 lb)< 35 µm (< 0.001378")< 30 µm (< 0.001181")0.034° (0.593 mrad)0.015° (0.262 mrad)0.03° (0.523 mrad)1.27 mm (0.05")3.4 kg (7.496 lb)
X-LRQ300BL-SV20.49609375 µm300 mm (11.811")35 µm (0.001378")< 21 µm (< 0.000827")205 mm/s (8.071"/s)0.000303 mm/s (0.000012"/s)0.000303 mm/s (0.000012"/s)60 N (13.5 lb)60 N (13.5 lb)< 35 µm (< 0.001378")< 30 µm (< 0.001181")0.034° (0.593 mrad)0.015° (0.262 mrad)0.03° (0.523 mrad)6.35 mm (0.25")3.4 kg (7.496 lb)
X-LRQ450AL-SV20.09921875 µm450 mm (17.716")135 µm (0.005315")< 8 µm (< 0.000315")35 mm/s (1.378"/s)0.000061 mm/s (0.000002"/s)0.000061 mm/s (0.000002"/s)100 N (22.4 lb)100 N (22.4 lb)< 45 µm (< 0.001772")< 40 µm (< 0.001575")0.04° (0.698 mrad)0.025° (0.436 mrad)0.04° (0.698 mrad)1.27 mm (0.05")4.15 kg (9.149 lb)
X-LRQ450BL-SV20.49609375 µm450 mm (17.716")60 µm (0.002362")< 21 µm (< 0.000827")205 mm/s (8.071"/s)0.000303 mm/s (0.000012"/s)0.000303 mm/s (0.000012"/s)60 N (13.5 lb)60 N (13.5 lb)< 45 µm (< 0.001772")< 40 µm (< 0.001575")0.04° (0.698 mrad)0.025° (0.436 mrad)0.04° (0.698 mrad)6.35 mm (0.25")4.15 kg (9.149 lb)
X-LRQ600AL-SV20.09921875 µm600 mm (23.622")150 µm (0.005905")< 8 µm (< 0.000315")35 mm/s (1.378"/s)0.000061 mm/s (0.000002"/s)0.000061 mm/s (0.000002"/s)100 N (22.4 lb)100 N (22.4 lb)< 75 µm (< 0.002953")< 60 µm (< 0.002362")0.045° (0.785 mrad)0.035° (0.611 mrad)0.04° (0.698 mrad)1.27 mm (0.05")4.86 kg (10.714 lb)
X-LRQ600BL-SV20.49609375 µm600 mm (23.622")90 µm (0.003543")< 21 µm (< 0.000827")205 mm/s (8.071"/s)0.000303 mm/s (0.000012"/s)0.000303 mm/s (0.000012"/s)60 N (13.5 lb)60 N (13.5 lb)< 75 µm (< 0.002953")< 60 µm (< 0.002362")0.045° (0.785 mrad)0.035° (0.611 mrad)0.04° (0.698 mrad)6.35 mm (0.25")4.86 kg (10.714 lb)

Specification Charts & Notes

Thrust or torque is a function of speed. The values given above are maximums. These values cannot both be achieved simultaneously (i.e. at maximum speed, the unit will not produce maximum thrust).

Thrust Speed Performance

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Duty Cycle

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Bearing Lifetime

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