Glossary
| # | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| 2D Primitives Supported | 2D commands that generates a particular type of line segment or curve. | |
| 2D Primitives Supported 2D commands that generates a particular type of line segment or curve. | ||
| A | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| Accuracy (unidirectional) | The maximum error possible when moving between any two positions, when both positions are approached from the same direction. | °, mrad |
| Accuracy (unidirectional) | The maximum error possible when moving between any two positions, when both positions are approached from the same direction. | µm, " |
| Adjacent Optic Change Time | The time for the device to move between two adjacent optic positions, including communication time, when using default controller settings. | ms |
| Analog Input | Number of analog inputs available. | |
| Analog Input Range | Allowable input voltage range of analog inputs. | V |
| Analog Input Resolution | The smallest incremental voltage measurable or resolvable on the analog input. | mV |
| Analog Output | Number of analog outputs available. | |
| Analog Output Impedance | The impedance in the line between the voltage source and the user terminal. | Ω |
| Analog Output Range | Allowable output voltage range of analog outputs. | V |
| Analog Output Resolution | The smallest incremental voltage measurable or resolvable on the analog output. | mV |
| Angular Motion Per Motor Rev | The angular motion of a device corresponding to one complete revolution of the motor. | ° |
| Aperture Diameter | This is the diameter of the optical mounting hole (aperture) of the device. | mm, " |
| AutoDetect | Specifies whether the Zaber controller configures its settings automatically for the connected positioner. | |
| Axes of Motion | The number of axes of motion that the device is capable of controlling. In the case of a positioning device, it is the number of positioning axes. | |
| Axial Error Motion | The deviation coaxial to the mean axis of rotation. This excludes stage top form errors. | µm, " |
| Accuracy (unidirectional) The maximum error possible when moving between any two positions, when both positions are approached from the same direction. | °, mrad | |
| Accuracy (unidirectional) The maximum error possible when moving between any two positions, when both positions are approached from the same direction. | µm, " | |
| Adjacent Optic Change Time The time for the device to move between two adjacent optic positions, including communication time, when using default controller settings. | ms | |
| Analog Input Number of analog inputs available. | ||
| Analog Input Range Allowable input voltage range of analog inputs. | V | |
| Analog Input Resolution The smallest incremental voltage measurable or resolvable on the analog input. | mV | |
| Analog Output Number of analog outputs available. | ||
| Analog Output Impedance The impedance in the line between the voltage source and the user terminal. | Ω | |
| Analog Output Range Allowable output voltage range of analog outputs. | V | |
| Analog Output Resolution The smallest incremental voltage measurable or resolvable on the analog output. | mV | |
| Angular Motion Per Motor Rev The angular motion of a device corresponding to one complete revolution of the motor. | ° | |
| Aperture Diameter This is the diameter of the optical mounting hole (aperture) of the device. | mm, " | |
| AutoDetect Specifies whether the Zaber controller configures its settings automatically for the connected positioner. | ||
| Axes of Motion The number of axes of motion that the device is capable of controlling. In the case of a positioning device, it is the number of positioning axes. | ||
| Axial Error Motion The deviation coaxial to the mean axis of rotation. This excludes stage top form errors. | µm, " | |
| B | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| Back-driving Force | The force required to move the device in the direction of travel when unpowered. Applying a load that exceeds the back-driving force (such as in vertical operation) could damage the controller and cause injury in the case of stalling or power failure. The value can vary by up to +/- 30% from stage to stage. | N, lb |
| Backlash | The maximum difference in the actual position possible when a target position is approached from opposite directions. | °, mrad |
| Backlash | The maximum difference in the actual position possible when a target position is approached from opposite directions. | µm, " |
| Bearing Plane Offset | The distance from the bearing plane to the surface of the stage top. | mm, " |
| Built-in Controller | Specifies whether the device has an integrated controller or requires an external controller for operation. | |
| Buttons | The number of buttons on a device as part of the user interface. | |
| Back-driving Force The force required to move the device in the direction of travel when unpowered. Applying a load that exceeds the back-driving force (such as in vertical operation) could damage the controller and cause injury in the case of stalling or power failure. The value can vary by up to +/- 30% from stage to stage. | N, lb | |
| Backlash The maximum difference in the actual position possible when a target position is approached from opposite directions. | °, mrad | |
| Backlash The maximum difference in the actual position possible when a target position is approached from opposite directions. | µm, " | |
| Bearing Plane Offset The distance from the bearing plane to the surface of the stage top. | mm, " | |
| Built-in Controller Specifies whether the device has an integrated controller or requires an external controller for operation. | ||
| Buttons The number of buttons on a device as part of the user interface. | ||
| C | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| CE Compliant | Indicates if the device is CE compliant. | |
| CiA 402 Modes of Operation | The supported operation modes of a device as specified by the CANopen CiA 402 device profile for drives and motion control. | |
| Clear Aperture | The smallest unobstructed clear diameter in the optical path of the device. | mm, " |
| Closed-Loop Modes | This describes the various closed-loop modes. | |
| Colour Temperature | The colour temperature is used to describe broad spectrum light, ranging from 1000 to 10000, in degrees K, where low values are warm colours and high values are cool. | K |
| Communication Interface | The type of electrical interface used to send commands to the controller. Some examples of communication interfaces are USB 2.0, RS-232, and RS-485. | |
| Communication Protocol | The way in which the commands are formatted to send to the device. Please click on the "Communication Protocol" specification for a link to "Protocol Reference Manuals", or visit the support section of our website. The way in which the commands are formatted to send to the device. For more information on control protocols or the specific communication protocols used by Zaber, please see our tech article, Simplifying Control Protocols. Protocol Reference Manuals are provided on the Support Tab of our website. | |
| Compatible Optic Diameter | The optic diameter dimension(s) accommodated by the device or accessory. | |
| Compatible Optic Thickness | The maximum thickness of optics accommodated by the device or accessory. | mm, " |
| Connector Type | Connector type. | |
| Controller Maximum Current Per Phase | This is the maximum current that the controller can put out per phase of stepper motor. | mA, mA peak |
| Controller Maximum Current Per Phase | This is the maximum current that the controller can put out per phase of stepper motor. | Arms, A peak |
| Counterbalance Payload Range | The payload range that a vertical stage’s counterbalance can be adjusted to compensate for. This specification accounts for the moving mass of the stage and applies only when the stage is operating in a vertical orientation. A minimum payload may be required. | N, lb |
| Counterbalance Type | The type of counterbalance used to compensate for the weight of a payload mounted to a vertical stage. | |
| Current Rating | Rated output current of power supply. | A |
| CE Compliant Indicates if the device is CE compliant. | ||
| CiA 402 Modes of Operation The supported operation modes of a device as specified by the CANopen CiA 402 device profile for drives and motion control. | ||
| Clear Aperture The smallest unobstructed clear diameter in the optical path of the device. | mm, " | |
| Closed-Loop Modes This describes the various closed-loop modes. | ||
| Colour Temperature The colour temperature is used to describe broad spectrum light, ranging from 1000 to 10000, in degrees K, where low values are warm colours and high values are cool. | K | |
| Communication Interface The type of electrical interface used to send commands to the controller. Some examples of communication interfaces are USB 2.0, RS-232, and RS-485. | ||
| Communication Protocol The way in which the commands are formatted to send to the device. Please click on the "Communication Protocol" specification for a link to "Protocol Reference Manuals", or visit the support section of our website. The way in which the commands are formatted to send to the device. For more information on control protocols or the specific communication protocols used by Zaber, please see our tech article, Simplifying Control Protocols. Protocol Reference Manuals are provided on the Support Tab of our website. | ||
| Compatible Optic Diameter The optic diameter dimension(s) accommodated by the device or accessory. | ||
| Compatible Optic Thickness The maximum thickness of optics accommodated by the device or accessory. | mm, " | |
| Connector Type Connector type. | ||
| Controller Maximum Current Per Phase This is the maximum current that the controller can put out per phase of stepper motor. | mA, mA peak | |
| Controller Maximum Current Per Phase This is the maximum current that the controller can put out per phase of stepper motor. | Arms, A peak | |
| Counterbalance Payload Range The payload range that a vertical stage’s counterbalance can be adjusted to compensate for. This specification accounts for the moving mass of the stage and applies only when the stage is operating in a vertical orientation. A minimum payload may be required. | N, lb | |
| Counterbalance Type The type of counterbalance used to compensate for the weight of a payload mounted to a vertical stage. | ||
| Current Rating Rated output current of power supply. | A | |
| D | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| Data Cable Connection | Describes the cable and connector type required to communicate with a motion control device. | |
| Default Resolution | The default microstep size as a fraction of a full step. | of a step |
| Device Profile | Industry standardized behavioral specifications that a device may conform to. | |
| Digital Input | Number of digital inputs available. | |
| Digital Output | Number of digital outputs available. | |
| Display | Describes the display type on devices with LCD displays. | |
| Data Cable Connection Describes the cable and connector type required to communicate with a motion control device. | ||
| Default Resolution The default microstep size as a fraction of a full step. | of a step | |
| Device Profile Industry standardized behavioral specifications that a device may conform to. | ||
| Digital Input Number of digital inputs available. | ||
| Digital Output Number of digital outputs available. | ||
| Display Describes the display type on devices with LCD displays. | ||
| E | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| E-Stop Input Range | The voltage range over which the E-Stop will be disengaged. | V |
| Encoder Count Size | This is the angular motion of the rotary device per count of the encoder. Counts depend on the number of lines on the encoder disc and the interpolation of the encoder read head. | °/count, arc sec/count |
| Encoder Count Size | This is the linear motion of a device per count of the encoder. Counts depend on the number of lines on the encoder track and the interpolation of the encoder read head. | nm |
| Encoder Output Axes | The number of axes of motion for which the device provides encoder outputs. | |
| Encoder Output Type | Describes the type of encoder output provided by the device (Zaber's T7, T8, T15, or T16 outputs.) | |
| Encoder Resolution | The smallest increment that can be read from the encoder. | nm |
| Encoder Resolution | This is the line density of the encoder which indicates how many counts or signals are given per revolution. | CPR, states/rev |
| Encoder Type | Describes the type of encoder included. | |
| EtherCAT Cycle Rates | The EtherCAT network cycle rates that are supported by a device, determining how often process data (PDO) can be transferred. | |
| EtherCAT Process Data | Indicates the real time process data (PDO) capabilities that can be transferred via the EtherCAT network. | |
| EtherCAT Synchronization Modes | The EtherCAT synchronization modes that are supported by a device. | |
| Extension Cable Length | Length of extension cable. | m, ' |
| External Regen Resistor | The resistance and power ratings for an external regen resistor used in hard braking (optional). | |
| E-Stop Input Range The voltage range over which the E-Stop will be disengaged. | V | |
| Encoder Count Size This is the angular motion of the rotary device per count of the encoder. Counts depend on the number of lines on the encoder disc and the interpolation of the encoder read head. | °/count, arc sec/count | |
| Encoder Count Size This is the linear motion of a device per count of the encoder. Counts depend on the number of lines on the encoder track and the interpolation of the encoder read head. | nm | |
| Encoder Output Axes The number of axes of motion for which the device provides encoder outputs. | ||
| Encoder Output Type Describes the type of encoder output provided by the device (Zaber's T7, T8, T15, or T16 outputs.) | ||
| Encoder Resolution The smallest increment that can be read from the encoder. | nm | |
| Encoder Resolution This is the line density of the encoder which indicates how many counts or signals are given per revolution. | CPR, states/rev | |
| Encoder Type Describes the type of encoder included. | ||
| EtherCAT Cycle Rates The EtherCAT network cycle rates that are supported by a device, determining how often process data (PDO) can be transferred. | ||
| EtherCAT Process Data Indicates the real time process data (PDO) capabilities that can be transferred via the EtherCAT network. | ||
| EtherCAT Synchronization Modes The EtherCAT synchronization modes that are supported by a device. | ||
| Extension Cable Length Length of extension cable. | m, ' | |
| External Regen Resistor The resistance and power ratings for an external regen resistor used in hard braking (optional). | ||
| F | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| FWHM (Full Width at Half Maximum) | The width of the band of light at half of the peak intensity; also referred to as Spectral Bandwidth. | nm |
| Field Number (FN) | The diameter of the area in the image plane that can be observed with a camera. FN can be used to determine the field of view (FOV) using the formula FOV=FN/M where M is the magnification of the objective. | mm, " |
| Filter Cube Change Time | The time for the device to move between two adjacent filter cubes when using default controller settings. | ms |
| Flatness | The maximum deviation of the stage top from a best fit plane, measured at a fixed location over the full range of motion of a multi-axis stage. | µm, " |
| Focus Sensor Repeatability | The maximum deviation in focus position when repeatedly instructing a focus stage to move to the in focus position as indicated by the HL04 sensor 100 times, approaching from the same direction every time, under stable thermal conditions. | nm |
| Focus Stage | The Zaber device used for focusing the objective. | |
| Focus Stage Backlash | The maximum difference in the actual position possible when a target position is approached from opposite directions. | µm, " |
| Focus Stage Encoder Resolution | The smallest increment that can be read from the encoder. | nm |
| Focus Stage Minimum Incremental Move | The smallest mechanical incremental step that the focus stage is capable of reliably performing. | nm |
| Focus Stage Repeatability | The maximum deviation in actual position when repeatedly instructing a device to move to a target position 100 times, approaching from the same direction every time, under stable thermal conditions. | µm, " |
| Focus Time | Maximum time to move the focus stage from any arbitrary position where the focus sensor is in range, to the position where it reports it is in focus | ms |
| Following Error | The positional deviation from the best-fit line of a linear trajectory. Velocity stability and following error depend greatly on payload, servo tuning, and other setup conditions. | |
| Footprint | The area occupied by a stage during normal operation, including consideration for cable connections. The area is defined as a rectangle with edges parallel and perpendicular to the axis of stage travel. | mm2 |
| Force Constant | The typical amount of force per amp output from a direct drive device. | N/A, lbs/A |
| Force Resolution | The smallest increment of force that can be output by a device in force mode. | mN, oz |
| FWHM (Full Width at Half Maximum) The width of the band of light at half of the peak intensity; also referred to as Spectral Bandwidth. | nm | |
| Field Number (FN) The diameter of the area in the image plane that can be observed with a camera. FN can be used to determine the field of view (FOV) using the formula FOV=FN/M where M is the magnification of the objective. | mm, " | |
| Filter Cube Change Time The time for the device to move between two adjacent filter cubes when using default controller settings. | ms | |
| Flatness The maximum deviation of the stage top from a best fit plane, measured at a fixed location over the full range of motion of a multi-axis stage. | µm, " | |
| Focus Sensor Repeatability The maximum deviation in focus position when repeatedly instructing a focus stage to move to the in focus position as indicated by the HL04 sensor 100 times, approaching from the same direction every time, under stable thermal conditions. | nm | |
| Focus Stage The Zaber device used for focusing the objective. | ||
| Focus Stage Backlash The maximum difference in the actual position possible when a target position is approached from opposite directions. | µm, " | |
| Focus Stage Encoder Resolution The smallest increment that can be read from the encoder. | nm | |
| Focus Stage Minimum Incremental Move The smallest mechanical incremental step that the focus stage is capable of reliably performing. | nm | |
| Focus Stage Repeatability The maximum deviation in actual position when repeatedly instructing a device to move to a target position 100 times, approaching from the same direction every time, under stable thermal conditions. | µm, " | |
| Focus Time Maximum time to move the focus stage from any arbitrary position where the focus sensor is in range, to the position where it reports it is in focus | ms | |
| Following Error The positional deviation from the best-fit line of a linear trajectory. Velocity stability and following error depend greatly on payload, servo tuning, and other setup conditions. | ||
| Footprint The area occupied by a stage during normal operation, including consideration for cable connections. The area is defined as a rectangle with edges parallel and perpendicular to the axis of stage travel. | mm2 | |
| Force Constant The typical amount of force per amp output from a direct drive device. | N/A, lbs/A | |
| Force Resolution The smallest increment of force that can be output by a device in force mode. | mN, oz | |
| G | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| Gear Ratio | Number of teeth of the driven gear by the number of teeth of the driving worm. | |
| Guide Type | The type of guide used to constrain the stage to the axis of motion. | |
| Gear Ratio Number of teeth of the driven gear by the number of teeth of the driving worm. | ||
| Guide Type The type of guide used to constrain the stage to the axis of motion. | ||
| H | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| Horizontal Runout | The maximum horizontal deviation of the centre of the stage top from the axis of travel as the device is moved through its full range of motion. | µm, " |
| Horizontal Runout The maximum horizontal deviation of the centre of the stage top from the axis of travel as the device is moved through its full range of motion. | µm, " | |
| I | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| Inductance | Inductance of each phase of the motor. | mH/phase |
| Input Voltage | Input voltage of power supply. | VAC |
| Isolated Digital Input | Number of opto-isolated digital inputs available. | |
| Isolated Digital Output | Number of opto-isolated digital outputs available. | |
| Inductance Inductance of each phase of the motor. | mH/phase | |
| Input Voltage Input voltage of power supply. | VAC | |
| Isolated Digital Input Number of opto-isolated digital inputs available. | ||
| Isolated Digital Output Number of opto-isolated digital outputs available. | ||
| J | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| Joystick Control | Describes the various control modes. | |
| Joystick Control Describes the various control modes. | ||
| L | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| LED Channel | Indicates the number of LED illumination channels that can be driven by the controller. | |
| LED Indicators | Indicates the number and purpose of LED indicator lights. | |
| Laser Wavelength | Wavelength of of laser light emitted by source. | nm |
| Limit Sensors per Axis | Number of limit sensor inputs available per axis. | |
| Limit or Home Sensing | Describes what type of limit or home sensing capabilities are built into a motion device. | |
| Linear Motion Per Motor Rev | The linear motion corresponding to one complete revolution of the motor. | mm, " |
| Load Capacity | The maximum centred load for an XY gantry or XY stage. This value will be lower than the rated load for a similar stage as an individual axis, and includes safe operating loads for the specific gantry configuration and assembly hardware. Load capacities can only be reached safely with the corresponding operating parameters in the user manual. | kg, lb |
| Loaded Accuracy (10 N) | The maximum error possible when moving between any two positions, when both positions are approached from the same direction with a 1 kg load on the device. Applies to products where the expected load is along the axis of travel. | µm, " |
| Loaded Backlash (10 N) | The maximum difference in the actual position possible when a target position is approached from opposite directions with a 1 kg load on the device. Applies to products where the expected load is along the axis of travel. | µm, " |
| Lower Moving Mass | The mass of a multi-axis stage's driven components along the lower axis. This excludes any external payloads. | kg, lbs |
| Lower Travel Range | The maximum physical range of travel of a multi-axis motion control device along the lower axis. | mm, " |
| LED Channel Indicates the number of LED illumination channels that can be driven by the controller. | ||
| LED Indicators Indicates the number and purpose of LED indicator lights. | ||
| Laser Wavelength Wavelength of of laser light emitted by source. | nm | |
| Limit Sensors per Axis Number of limit sensor inputs available per axis. | ||
| Limit or Home Sensing Describes what type of limit or home sensing capabilities are built into a motion device. | ||
| Linear Motion Per Motor Rev The linear motion corresponding to one complete revolution of the motor. | mm, " | |
| Load Capacity The maximum centred load for an XY gantry or XY stage. This value will be lower than the rated load for a similar stage as an individual axis, and includes safe operating loads for the specific gantry configuration and assembly hardware. Load capacities can only be reached safely with the corresponding operating parameters in the user manual. | kg, lb | |
| Loaded Accuracy (10 N) The maximum error possible when moving between any two positions, when both positions are approached from the same direction with a 1 kg load on the device. Applies to products where the expected load is along the axis of travel. | µm, " | |
| Loaded Backlash (10 N) The maximum difference in the actual position possible when a target position is approached from opposite directions with a 1 kg load on the device. Applies to products where the expected load is along the axis of travel. | µm, " | |
| Lower Moving Mass The mass of a multi-axis stage's driven components along the lower axis. This excludes any external payloads. | kg, lbs | |
| Lower Travel Range The maximum physical range of travel of a multi-axis motion control device along the lower axis. | mm, " | |
| M | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| Manual Control | Indicates the presence and type of control knob for manually sending movement commands to the device. | |
| Maximum Acceleration | The rate of change of velocity as a function of time. | m/s2, g |
| Maximum Angular Momentum | The maximum recommended angular momentum for a load placed on the stage top (moment of inertia of the load about the axis of rotation of the stage, multiplied by the stage angular velocity in rad/s). This is based on the capacity of a loaded rotary stage to withstand the sudden impulse from a stall or emergency stop. Exceeding the rated angular momentum will result in a reduced lifetime for the stage. | kg⋅m2/s |
| Maximum Axial Brake Force | The maximum recommended force that can be applied in the direction of travel to a linear stage with a brake. Exceeding this value may result in the brake slipping. | N, lb |
| Maximum Brake Torque | The maximum recommended torque that can be applied to a rotary device with a brake. Exceeding this value may result in the brake slipping. | N⋅cm, oz⋅in |
| Maximum Centered Load | The maximum allowable force that can be applied at the center of the stage, perpendicular to the stage surface. In the case of a mirror mount it is the maximum weight that can be mounted to the face plate of the mirror mount. In the case of gimbals, centered means that the load is concentric with the azimuth axis and coincident with the elevation axis throughout the travel range. | N, lb |
| Maximum Continuous Thrust | The maximum continuous load that can be applied in the direction of travel. This may be less than the maximum force the device is capable of exerting. Exceeding this force will reduce lifetime in screw driven products. Direct drive devices will disable the motor if the maximum continuous thrust is exceeded for too long. Thrust is a function of speed; maximum thrust is obtained at the lowest speeds. | N, lb |
| Maximum Continuous Torque | The maximum recommended continuous operating torque of a rotary motion device. Note that this may be less than the maximum torque the device is capable of exerting. Exceeding this force will result in reduced lifetime. | N⋅cm, oz⋅in |
| Maximum Current Draw | The maximum current that the device may draw from a power supply of the recommended voltage. Maximum current is usually drawn when the device is operating at high load and speed. | mA |
| Maximum Current Per Channel | The maximum current that each channel is able to deliver to the load. | Amps |
| Maximum Current per LED Channel | Indicates the maximum current in mA that can be provided to an attached LED channel. | mA |
| Maximum Dynamic Load | The maximum allowable force that can be applied at the center of the stage, perpendicular to the stage surface while the stage is in motion. | N, lb |
| Maximum Moment (Pitch) | The maximum moment load that may be applied about the Y-axis of a linear stage. | N⋅m, ft⋅lb |
| Maximum Moment (Pitch) | The maximum moment load that may be applied about the Y-axis of a linear stage. | N⋅cm, oz⋅in |
| Maximum Moment (Roll) | The maximum moment load that may be applied about the X-axis of a linear stage. | N⋅m, ft⋅lb |
| Maximum Moment (Roll) | The maximum moment load that may be applied about the X-axis of a linear stage. | N⋅cm, oz⋅in |
| Maximum Moment (Transverse) | The maximum moment load that may be applied about the stage top of a rotary device perpendicular to the rotational travel axis. | N⋅cm, oz⋅in |
| Maximum Moment (Transverse) | The maximum moment load that may be applied about the stage top of a rotary device perpendicular to the rotational travel axis. | N⋅m, ft⋅lb |
| Maximum Moment (Yaw) | The maximum moment load that may be applied about the Z-axis of a linear stage. | N⋅m, ft⋅lb |
| Maximum Moment (Yaw) | The maximum moment load that may be applied about the Z-axis of a linear stage. | N⋅cm, oz⋅in |
| Maximum Optic Weight | Maximum weight of individual optics which can be supported by the system. | kg, lb |
| Maximum Speed | The maximum speed at which a motorized device can move under no load. Note that the speed is a function of load and the maximum speed can only be achieved at low loads. | °/s, rpm |
| Maximum Speed | The maximum speed at which a motorized device can move. Note that the speed is a function of load and the maximum speed can only be achieved at low loads. | mm/s, "/s |
| Maximum Speed | The maximum speed at which a motorized device can move under no load. Note that the speed is a function of load and the maximum speed can only be achieved at low loads. | °/s |
| Maximum Static Load | The maximum allowable force that can be applied at the center of the stage, perpendicular to the stage surface while the stage is in a fixed position. Exceeding this load can result in damage to the stage. | N, lb |
| Maximum Torque | The maximum torque that a motorized rotary device can apply. Note that torque is a function of speed and the maximum torque is obtained at the lowest speeds. | N⋅cm, oz⋅in |
| Maximum Vertical Deflection / Load | The coefficient of maximum vertical deflection / load for a given payload on a multi-stage setup. For gantries, this is maximal when centered on the Y travel. For XY and XYZ stages, this is maximal when at either end of the Y travel. | µm/kg |
| Maximum Y Axis Deflection / Load | The coefficient of maximum Y axis deflection / load given a certain payload centered on the Y axis's travel. | µm/kg |
| Mechanical Drive System | Describes the method of converting motor rotation to device motion. | |
| Microstep Size (Default Resolution) | The calculated angular displacement for each microstep of motor movement at default settings. This displacement is equal to the default microstep resolution (1/64 on most devices) multiplied by the angular displacement traveled during one full step of the motor. | °, µrad |
| Microstep Size (Default Resolution) | The calculated linear distance traveled for each microstep of motor movement at default settings. This distance is equal to the default microstep resolution (1/64 on most devices) multiplied by the distance traveled during one full step of the motor. | µm |
| Minimum Incremental Move | The smallest mechanical incremental step that a positioning axis is capable of reliably performing. | nm |
| Minimum Speed | The minimum speed that a motorized device can be set to at default resolution. | mm/s, "/s |
| Minimum Speed | The minimum speed that a motorized device can be set to at default resolution. | °/s, µrad/s |
| Minimum Speed | The minimum speed that a motorized device can be set to at default resolution. | nm/s |
| Motor Connection | Describes what type of connector is provided on a motor or motorized device to interface with a motor controller. | |
| Motor Frame Size | This is the standard NEMA frame size specification for a motor. It specifies the nominal size of the motor in tenths of an inch (ex size 11 has a nominal size of 1.1 inch square). | |
| Motor Rated Current | Indicates the rated continuous current per phase of the motor used in motorized motion control devices, or the maximum current rating of the peripheral hardware if it is lower than the motor rating. | mA/phase |
| Motor Rated Power | Indicates the maximum rated continuous power output of the motor. | Watts |
| Motor Shaft Style | Specifies Single or Double depending whether the motor shaft extends from both sides of the motor or just one. | |
| Motor Steps Per Rev | Specifies the number of steps per revolution of the stepper motor used in the device. | |
| Motor Temperature Rise | The maximum increase in motor temperature above ambient that will occur in open air, during continuous operation at maximum running current and low speeds. | °C |
| Motor Type | Indicates what type of motor is used in motorized motion control devices. | |
| Motor Winding Resistance | Electrical resistance of the windings of the motor. | ohms/phase |
| Mounting Interface | Indicates how the device may be mounted to other components, and how other devices or accessories may be mounted to the device. | |
| Moving Mass | The mass of a stage's driven components. This excludes any external payloads. | kg, lbs |
| Multi-Axes Power Supply | Power supply capable of powering a multi-axis system (up to 3 devices). | |
| Manual Control Indicates the presence and type of control knob for manually sending movement commands to the device. | ||
| Maximum Acceleration The rate of change of velocity as a function of time. | m/s2, g | |
| Maximum Angular Momentum The maximum recommended angular momentum for a load placed on the stage top (moment of inertia of the load about the axis of rotation of the stage, multiplied by the stage angular velocity in rad/s). This is based on the capacity of a loaded rotary stage to withstand the sudden impulse from a stall or emergency stop. Exceeding the rated angular momentum will result in a reduced lifetime for the stage. | kg⋅m2/s | |
| Maximum Axial Brake Force The maximum recommended force that can be applied in the direction of travel to a linear stage with a brake. Exceeding this value may result in the brake slipping. | N, lb | |
| Maximum Brake Torque The maximum recommended torque that can be applied to a rotary device with a brake. Exceeding this value may result in the brake slipping. | N⋅cm, oz⋅in | |
| Maximum Centered Load The maximum allowable force that can be applied at the center of the stage, perpendicular to the stage surface. In the case of a mirror mount it is the maximum weight that can be mounted to the face plate of the mirror mount. In the case of gimbals, centered means that the load is concentric with the azimuth axis and coincident with the elevation axis throughout the travel range. | N, lb | |
| Maximum Continuous Thrust The maximum continuous load that can be applied in the direction of travel. This may be less than the maximum force the device is capable of exerting. Exceeding this force will reduce lifetime in screw driven products. Direct drive devices will disable the motor if the maximum continuous thrust is exceeded for too long. Thrust is a function of speed; maximum thrust is obtained at the lowest speeds. | N, lb | |
| Maximum Continuous Torque The maximum recommended continuous operating torque of a rotary motion device. Note that this may be less than the maximum torque the device is capable of exerting. Exceeding this force will result in reduced lifetime. | N⋅cm, oz⋅in | |
| Maximum Current Draw The maximum current that the device may draw from a power supply of the recommended voltage. Maximum current is usually drawn when the device is operating at high load and speed. | mA | |
| Maximum Current Per Channel The maximum current that each channel is able to deliver to the load. | Amps | |
| Maximum Current per LED Channel Indicates the maximum current in mA that can be provided to an attached LED channel. | mA | |
| Maximum Dynamic Load The maximum allowable force that can be applied at the center of the stage, perpendicular to the stage surface while the stage is in motion. | N, lb | |
| Maximum Moment (Pitch) The maximum moment load that may be applied about the Y-axis of a linear stage. | N⋅m, ft⋅lb | |
| Maximum Moment (Pitch) The maximum moment load that may be applied about the Y-axis of a linear stage. | N⋅cm, oz⋅in | |
| Maximum Moment (Roll) The maximum moment load that may be applied about the X-axis of a linear stage. | N⋅m, ft⋅lb | |
| Maximum Moment (Roll) The maximum moment load that may be applied about the X-axis of a linear stage. | N⋅cm, oz⋅in | |
| Maximum Moment (Transverse) The maximum moment load that may be applied about the stage top of a rotary device perpendicular to the rotational travel axis. | N⋅cm, oz⋅in | |
| Maximum Moment (Transverse) The maximum moment load that may be applied about the stage top of a rotary device perpendicular to the rotational travel axis. | N⋅m, ft⋅lb | |
| Maximum Moment (Yaw) The maximum moment load that may be applied about the Z-axis of a linear stage. | N⋅m, ft⋅lb | |
| Maximum Moment (Yaw) The maximum moment load that may be applied about the Z-axis of a linear stage. | N⋅cm, oz⋅in | |
| Maximum Optic Weight Maximum weight of individual optics which can be supported by the system. | kg, lb | |
| Maximum Speed The maximum speed at which a motorized device can move under no load. Note that the speed is a function of load and the maximum speed can only be achieved at low loads. | °/s, rpm | |
| Maximum Speed The maximum speed at which a motorized device can move. Note that the speed is a function of load and the maximum speed can only be achieved at low loads. | mm/s, "/s | |
| Maximum Speed The maximum speed at which a motorized device can move under no load. Note that the speed is a function of load and the maximum speed can only be achieved at low loads. | °/s | |
| Maximum Static Load The maximum allowable force that can be applied at the center of the stage, perpendicular to the stage surface while the stage is in a fixed position. Exceeding this load can result in damage to the stage. | N, lb | |
| Maximum Torque The maximum torque that a motorized rotary device can apply. Note that torque is a function of speed and the maximum torque is obtained at the lowest speeds. | N⋅cm, oz⋅in | |
| Maximum Vertical Deflection / Load The coefficient of maximum vertical deflection / load for a given payload on a multi-stage setup. For gantries, this is maximal when centered on the Y travel. For XY and XYZ stages, this is maximal when at either end of the Y travel. | µm/kg | |
| Maximum Y Axis Deflection / Load The coefficient of maximum Y axis deflection / load given a certain payload centered on the Y axis's travel. | µm/kg | |
| Mechanical Drive System Describes the method of converting motor rotation to device motion. | ||
| Microstep Size (Default Resolution) The calculated angular displacement for each microstep of motor movement at default settings. This displacement is equal to the default microstep resolution (1/64 on most devices) multiplied by the angular displacement traveled during one full step of the motor. | °, µrad | |
| Microstep Size (Default Resolution) The calculated linear distance traveled for each microstep of motor movement at default settings. This distance is equal to the default microstep resolution (1/64 on most devices) multiplied by the distance traveled during one full step of the motor. | µm | |
| Minimum Incremental Move The smallest mechanical incremental step that a positioning axis is capable of reliably performing. | nm | |
| Minimum Speed The minimum speed that a motorized device can be set to at default resolution. | mm/s, "/s | |
| Minimum Speed The minimum speed that a motorized device can be set to at default resolution. | °/s, µrad/s | |
| Minimum Speed The minimum speed that a motorized device can be set to at default resolution. | nm/s | |
| Motor Connection Describes what type of connector is provided on a motor or motorized device to interface with a motor controller. | ||
| Motor Frame Size This is the standard NEMA frame size specification for a motor. It specifies the nominal size of the motor in tenths of an inch (ex size 11 has a nominal size of 1.1 inch square). | ||
| Motor Rated Current Indicates the rated continuous current per phase of the motor used in motorized motion control devices, or the maximum current rating of the peripheral hardware if it is lower than the motor rating. | mA/phase | |
| Motor Rated Power Indicates the maximum rated continuous power output of the motor. | Watts | |
| Motor Shaft Style Specifies Single or Double depending whether the motor shaft extends from both sides of the motor or just one. | ||
| Motor Steps Per Rev Specifies the number of steps per revolution of the stepper motor used in the device. | ||
| Motor Temperature Rise The maximum increase in motor temperature above ambient that will occur in open air, during continuous operation at maximum running current and low speeds. | °C | |
| Motor Type Indicates what type of motor is used in motorized motion control devices. | ||
| Motor Winding Resistance Electrical resistance of the windings of the motor. | ohms/phase | |
| Mounting Interface Indicates how the device may be mounted to other components, and how other devices or accessories may be mounted to the device. | ||
| Moving Mass The mass of a stage's driven components. This excludes any external payloads. | kg, lbs | |
| Multi-Axes Power Supply Power supply capable of powering a multi-axis system (up to 3 devices). | ||
| N | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| Nominal Wavelength | The average wavelength at peak intensity for the light. | nm |
| Nucleus Compatible | Indicates this product is compatible with the Nucleus systems. | |
| Number of Optics | The number of optics that can be mounted in the device or accessory. | |
| Number of Output Channels | The number of channels available per device. | |
| Number of Temperature Sensor Inputs | The number of temperature sensor inputs available per device. | |
| Nominal Wavelength The average wavelength at peak intensity for the light. | nm | |
| Nucleus Compatible Indicates this product is compatible with the Nucleus systems. | ||
| Number of Optics The number of optics that can be mounted in the device or accessory. | ||
| Number of Output Channels The number of channels available per device. | ||
| Number of Temperature Sensor Inputs The number of temperature sensor inputs available per device. | ||
| O | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| Operating Temperature Range | The allowable temperature extremes of the operating environment, assuming operation in still air. Note that under vacuum conditions, the upper limit may decrease considerably due to lack of natural convection. | °C |
| Optic Mounting Interface | Indicates how optical components may be mounted to a device such as a motorized mirror mount. | |
| Optical Notch Filter Stop Band Width | Width of the stop band of an optical notch filter. | nm |
| Optical Notch Filter Wavelength | Wavelength value in the center of the stop band on an optical notch filter. | nm |
| Optical System | Specifies which optical assembly the MVR is using. | |
| Orthogonality | The variation from 90 degrees between best fit lines of perpendicular travel directions, measured over the full range of motion of a multi-axis stage. | °, mrad |
| Output Voltage | Output voltage of power supply. | VDC |
| Operating Temperature Range The allowable temperature extremes of the operating environment, assuming operation in still air. Note that under vacuum conditions, the upper limit may decrease considerably due to lack of natural convection. | °C | |
| Optic Mounting Interface Indicates how optical components may be mounted to a device such as a motorized mirror mount. | ||
| Optical Notch Filter Stop Band Width Width of the stop band of an optical notch filter. | nm | |
| Optical Notch Filter Wavelength Wavelength value in the center of the stop band on an optical notch filter. | nm | |
| Optical System Specifies which optical assembly the MVR is using. | ||
| Orthogonality The variation from 90 degrees between best fit lines of perpendicular travel directions, measured over the full range of motion of a multi-axis stage. | °, mrad | |
| Output Voltage Output voltage of power supply. | VDC | |
| P | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| Peak Thrust | The maximum force that a device can exert in the direction of travel. Peak Thrust may exceed the device's Maximum Continuous Thrust. Thrust is a function of speed; maximum thrust is obtained at the lowest speeds. | N, lb |
| Pitch | Maximum rotation around the Y axis as the stage moves in the X direction. | °, mrad |
| Planar positional accuracy | The maximum deviation from the expected position in the ideal XY plane. | µm |
| Power Plug | The type of plug required to provide power to the device. | |
| Power Supply | The DC voltage input required to power a device. | VDC |
| Power-Off Brake | An electromagnetic brake which applies braking force when power is removed. | |
| Probe Angle Range | The angular movement possible of a product. | °, rad |
| Probe Diameter Range | The range of probe sizes that can be used within the product. | mm, " |
| Peak Thrust The maximum force that a device can exert in the direction of travel. Peak Thrust may exceed the device's Maximum Continuous Thrust. Thrust is a function of speed; maximum thrust is obtained at the lowest speeds. | N, lb | |
| Pitch Maximum rotation around the Y axis as the stage moves in the X direction. | °, mrad | |
| Planar positional accuracy The maximum deviation from the expected position in the ideal XY plane. | µm | |
| Power Plug The type of plug required to provide power to the device. | ||
| Power Supply The DC voltage input required to power a device. | VDC | |
| Power-Off Brake An electromagnetic brake which applies braking force when power is removed. | ||
| Probe Angle Range The angular movement possible of a product. | °, rad | |
| Probe Diameter Range The range of probe sizes that can be used within the product. | mm, " | |
| R | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| Radial Error Motion | The deviation perpendicular to the mean axis of rotation, measured at a specified height above the bearing plane. This excludes stage top form errors. | µm, " |
| Range | The maximum physical range of travel of a motion control device. | ° |
| Recommended Controller | Indicates what model of motor controller is recommended for a particular motor or motorized device. | |
| Repeatability | The maximum deviation in actual position when repeatedly instructing a device to move to a target position 100 times, approaching from the same direction every time, under stable thermal conditions. For multi-axis stages, the repeatability is for a single axis while other axes are kept fixed. | µm, " |
| Repeatability | The maximum deviation in actual position when repeatedly instructing a device to move to a target position 100 times, approaching from the same direction every time, under stable thermal conditions. | °, mrad |
| Resolution | The smallest increment that a motion control device can be instructed to move. The actual motion of the device may be different, due to stiction, backlash, or other mechanical issues. | ° |
| Roll | Maximum rotation around the X axis as the stage moves in the X direction. | °, mrad |
| Rotation Centre Accuracy | The possible deviation from the specified center of rotation (a fixed point in space about which the stage rotates). | mm, " |
| Rotation Centre Height | The distance from the stage surface to the center of rotation (a fixed point in space about which the stage rotates, usually for goniometers). | mm, " |
| Radial Error Motion The deviation perpendicular to the mean axis of rotation, measured at a specified height above the bearing plane. This excludes stage top form errors. | µm, " | |
| Range The maximum physical range of travel of a motion control device. | ° | |
| Recommended Controller Indicates what model of motor controller is recommended for a particular motor or motorized device. | ||
| Repeatability The maximum deviation in actual position when repeatedly instructing a device to move to a target position 100 times, approaching from the same direction every time, under stable thermal conditions. For multi-axis stages, the repeatability is for a single axis while other axes are kept fixed. | µm, " | |
| Repeatability The maximum deviation in actual position when repeatedly instructing a device to move to a target position 100 times, approaching from the same direction every time, under stable thermal conditions. | °, mrad | |
| Resolution The smallest increment that a motion control device can be instructed to move. The actual motion of the device may be different, due to stiction, backlash, or other mechanical issues. | ° | |
| Roll Maximum rotation around the X axis as the stage moves in the X direction. | °, mrad | |
| Rotation Centre Accuracy The possible deviation from the specified center of rotation (a fixed point in space about which the stage rotates). | mm, " | |
| Rotation Centre Height The distance from the stage surface to the center of rotation (a fixed point in space about which the stage rotates, usually for goniometers). | mm, " | |
| S | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| Speed Resolution | The smallest incremental change in speed that can be achieved by the device at default resolution. | mm/s, "/s |
| Speed Resolution | The smallest incremental change in speed that can be achieved by the device at default resolution. | °/s, µrad/s |
| Speed Resolution | The smallest incremental change in speed that can be achieved by the device at default resolution. | nm/s |
| Stage Parallelism | The maximum deviation in height of the stage top, with respect to the stage base, measured at one position in travel. The angle between the stage top and base will vary over travel due to the pitch and roll of the stage. | µm, " |
| Stage Top Dimension | This is the characteristic dimension of the stage top. | mm, " |
| Stiffness in Pitch | The rotational stiffness of a linear stage about its Y-axis. | N⋅m/°, µrad/N⋅m |
| Stiffness in Roll | The rotational stiffness of a linear stage about its X-axis. | N⋅m/°, µrad/N⋅m |
| Stiffness in Yaw | The rotational stiffness of a linear stage about its Z-axis. | N⋅m/°, µrad/N⋅m |
| Supported Temperature Sensor Types | The types of temperature sensor the device is able to read. | |
| Speed Resolution The smallest incremental change in speed that can be achieved by the device at default resolution. | mm/s, "/s | |
| Speed Resolution The smallest incremental change in speed that can be achieved by the device at default resolution. | °/s, µrad/s | |
| Speed Resolution The smallest incremental change in speed that can be achieved by the device at default resolution. | nm/s | |
| Stage Parallelism The maximum deviation in height of the stage top, with respect to the stage base, measured at one position in travel. The angle between the stage top and base will vary over travel due to the pitch and roll of the stage. | µm, " | |
| Stage Top Dimension This is the characteristic dimension of the stage top. | mm, " | |
| Stiffness in Pitch The rotational stiffness of a linear stage about its Y-axis. | N⋅m/°, µrad/N⋅m | |
| Stiffness in Roll The rotational stiffness of a linear stage about its X-axis. | N⋅m/°, µrad/N⋅m | |
| Stiffness in Yaw The rotational stiffness of a linear stage about its Z-axis. | N⋅m/°, µrad/N⋅m | |
| Supported Temperature Sensor Types The types of temperature sensor the device is able to read. | ||
| T | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| Tilt Error Motion | The angular deviation of the axis of rotation away from its mean position. This excludes errors from stage base parallelism, and stage top parallelism. | °, µrad |
| Travel Range | The maximum physical range of travel of a motion control device. | mm, " |
| Typical Focus Stage Move and Settle Time (1000 nm move, < 15 nm, 165 g load) | The time that is required for the focus stage to complete a 1000 nm move and settle within 15 nm of the target using a 165 g objective lens and optimized servo tuning. | ms |
| Typical Focus Stage Move and Settle Time (200 nm move, < 15 nm, 165 g load) | The time that is required for the focus stage to complete a 200 nm move and settle within 15 nm of the target using a 165 g objective lens and optimized servo tuning. | ms |
| Typical Focus Stage Move and Settle Time (500 nm move, < 15 nm, 165 g load) | The time that is required for the focus stage to complete a 500 nm move and settle within 15 nm of the target using a 165 g objective lens and optimized servo tuning. | ms |
| Typical Velocity Stability | The percentage velocity deviation from the average velocity that a stage can be expected to be within 95% of the time. Velocity stability and following error depend greatly on payload, servo tuning, and other setup conditions. | |
| Tilt Error Motion The angular deviation of the axis of rotation away from its mean position. This excludes errors from stage base parallelism, and stage top parallelism. | °, µrad | |
| Travel Range The maximum physical range of travel of a motion control device. | mm, " | |
| Typical Focus Stage Move and Settle Time (1000 nm move, < 15 nm, 165 g load) The time that is required for the focus stage to complete a 1000 nm move and settle within 15 nm of the target using a 165 g objective lens and optimized servo tuning. | ms | |
| Typical Focus Stage Move and Settle Time (200 nm move, < 15 nm, 165 g load) The time that is required for the focus stage to complete a 200 nm move and settle within 15 nm of the target using a 165 g objective lens and optimized servo tuning. | ms | |
| Typical Focus Stage Move and Settle Time (500 nm move, < 15 nm, 165 g load) The time that is required for the focus stage to complete a 500 nm move and settle within 15 nm of the target using a 165 g objective lens and optimized servo tuning. | ms | |
| Typical Velocity Stability The percentage velocity deviation from the average velocity that a stage can be expected to be within 95% of the time. Velocity stability and following error depend greatly on payload, servo tuning, and other setup conditions. | ||
| U | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| Upper Moving Mass | The mass of a multi-axis stage's driven components along the upper axis. This excludes any external payloads. | kg, lbs |
| Upper Travel Range | The maximum physical range of travel of a multi-axis motion control device along the upper axis. | mm, " |
| Upper Moving Mass The mass of a multi-axis stage's driven components along the upper axis. This excludes any external payloads. | kg, lbs | |
| Upper Travel Range The maximum physical range of travel of a multi-axis motion control device along the upper axis. | mm, " | |
| V | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| Vacuum Compatible | Indicates if the device is vacuum compatible. | |
| Vertical Runout | The maximum change in height of the centre of the stage top, as the device is moved through its full range of motion. | µm, " |
| Vacuum Compatible Indicates if the device is vacuum compatible. | ||
| Vertical Runout The maximum change in height of the centre of the stage top, as the device is moved through its full range of motion. | µm, " | |
| W | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| Weight | Weight of the product. | kg, lb |
| Weight Weight of the product. | kg, lb | |
| X | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| X Travel Range | The maximum physical range of travel of a motion control device along X axis. | mm, " |
| XY Stage | The Zaber device used for linear motion in both X and Y axes. | |
| XY Stage Backlash | The maximum difference in the actual position possible when a target position is approached from opposite directions. | µm, " |
| XY Stage Microstep Size (Default Resolution) | The calculated linear distance traveled for each microstep of motor movement at default settings. This distance is equal to the default microstep resolution (1/64 on most devices) multiplied by the distance traveled during one full step of the motor. | µm |
| XY Stage Repeatability | The maximum deviation in actual position when repeatedly instructing a device to move to a target position 100 times, approaching from the same direction every time, under stable thermal conditions. | µm, " |
| X Travel Range The maximum physical range of travel of a motion control device along X axis. | mm, " | |
| XY Stage The Zaber device used for linear motion in both X and Y axes. | ||
| XY Stage Backlash The maximum difference in the actual position possible when a target position is approached from opposite directions. | µm, " | |
| XY Stage Microstep Size (Default Resolution) The calculated linear distance traveled for each microstep of motor movement at default settings. This distance is equal to the default microstep resolution (1/64 on most devices) multiplied by the distance traveled during one full step of the motor. | µm | |
| XY Stage Repeatability The maximum deviation in actual position when repeatedly instructing a device to move to a target position 100 times, approaching from the same direction every time, under stable thermal conditions. | µm, " | |
| Y | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| Y Travel Range | The maximum physical range of travel of a motion control device along Y axis. | mm, " |
| Yaw | Maximum rotation around the Z axis as the stage moves in the X direction. | °, mrad |
| Y Travel Range The maximum physical range of travel of a motion control device along Y axis. | mm, " | |
| Yaw Maximum rotation around the Z axis as the stage moves in the X direction. | °, mrad | |
| Z | ||
| Term | Description | Units |
|---|---|---|
| Term Description | Units | |
| Z Travel Range | The maximum physical range of travel of a motion control device along Z axis. | mm, " |
| Z Travel Range The maximum physical range of travel of a motion control device along Z axis. | mm, " | |