X-LRQ-SV2 Series
High vacuum motorized linear stages with built-in controllers
Series Specifications
Download DatasheetPart Specifications Comparison
| Part Number | Microstep Size (Default Resolution) | Travel Range | Accuracy (unidirectional) | Backlash | Maximum Speed | Minimum Speed | Speed Resolution | Peak Thrust | Maximum Continuous Thrust | Flatness of Travel | Straightness of Travel | Pitch | Roll | Yaw | Linear Motion Per Motor Rev | Weight |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| X-LRQ075AL-SV2 | 0.09921875 µm | 75 mm (2.953") | 23 µm (0.000906") | < 8 µm (< 0.000315") | 35 mm/s (1.378"/s) | 0.000061 mm/s (0.000002"/s) | 0.000061 mm/s (0.000002"/s) | 100 N (22.4 lb) | 100 N (22.4 lb) | < 20 µm (< 0.000787") | < 20 µm (< 0.000787") | 0.025° (0.436 mrad) | 0.01° (0.174 mrad) | 0.02° (0.349 mrad) | 1.27 mm (0.05") | 2.27 kg (5.004 lb) |
| X-LRQ075BL-SV2 | 0.49609375 µm | 75 mm (2.953") | 15 µm (0.000591") | < 21 µm (< 0.000827") | 205 mm/s (8.071"/s) | 0.000303 mm/s (0.000012"/s) | 0.000303 mm/s (0.000012"/s) | 60 N (13.5 lb) | 60 N (13.5 lb) | < 20 µm (< 0.000787") | < 20 µm (< 0.000787") | 0.025° (0.436 mrad) | 0.01° (0.174 mrad) | 0.02° (0.349 mrad) | 6.35 mm (0.25") | 2.27 kg (5.004 lb) |
| X-LRQ150AL-SV2 | 0.09921875 µm | 150 mm (5.905") | 45 µm (0.001772") | < 8 µm (< 0.000315") | 35 mm/s (1.378"/s) | 0.000061 mm/s (0.000002"/s) | 0.000061 mm/s (0.000002"/s) | 100 N (22.4 lb) | 100 N (22.4 lb) | < 25 µm (< 0.000984") | < 20 µm (< 0.000787") | 0.03° (0.523 mrad) | 0.015° (0.262 mrad) | 0.02° (0.349 mrad) | 1.27 mm (0.05") | 2.64 kg (5.82 lb) |
| X-LRQ150BL-SV2 | 0.49609375 µm | 150 mm (5.905") | 25 µm (0.000984") | < 21 µm (< 0.000827") | 205 mm/s (8.071"/s) | 0.000303 mm/s (0.000012"/s) | 0.000303 mm/s (0.000012"/s) | 60 N (13.5 lb) | 60 N (13.5 lb) | < 25 µm (< 0.000984") | < 20 µm (< 0.000787") | 0.03° (0.523 mrad) | 0.015° (0.262 mrad) | 0.02° (0.349 mrad) | 6.35 mm (0.25") | 2.64 kg (5.82 lb) |
| X-LRQ300AL-SV2 | 0.09921875 µm | 300 mm (11.811") | 90 µm (0.003543") | < 8 µm (< 0.000315") | 35 mm/s (1.378"/s) | 0.000061 mm/s (0.000002"/s) | 0.000061 mm/s (0.000002"/s) | 100 N (22.4 lb) | 100 N (22.4 lb) | < 35 µm (< 0.001378") | < 30 µm (< 0.001181") | 0.034° (0.593 mrad) | 0.015° (0.262 mrad) | 0.03° (0.523 mrad) | 1.27 mm (0.05") | 3.4 kg (7.496 lb) |
| X-LRQ300BL-SV2 | 0.49609375 µm | 300 mm (11.811") | 35 µm (0.001378") | < 21 µm (< 0.000827") | 205 mm/s (8.071"/s) | 0.000303 mm/s (0.000012"/s) | 0.000303 mm/s (0.000012"/s) | 60 N (13.5 lb) | 60 N (13.5 lb) | < 35 µm (< 0.001378") | < 30 µm (< 0.001181") | 0.034° (0.593 mrad) | 0.015° (0.262 mrad) | 0.03° (0.523 mrad) | 6.35 mm (0.25") | 3.4 kg (7.496 lb) |
| X-LRQ450AL-SV2 | 0.09921875 µm | 450 mm (17.716") | 135 µm (0.005315") | < 8 µm (< 0.000315") | 35 mm/s (1.378"/s) | 0.000061 mm/s (0.000002"/s) | 0.000061 mm/s (0.000002"/s) | 100 N (22.4 lb) | 100 N (22.4 lb) | < 45 µm (< 0.001772") | < 40 µm (< 0.001575") | 0.04° (0.698 mrad) | 0.025° (0.436 mrad) | 0.04° (0.698 mrad) | 1.27 mm (0.05") | 4.15 kg (9.149 lb) |
| X-LRQ450BL-SV2 | 0.49609375 µm | 450 mm (17.716") | 60 µm (0.002362") | < 21 µm (< 0.000827") | 205 mm/s (8.071"/s) | 0.000303 mm/s (0.000012"/s) | 0.000303 mm/s (0.000012"/s) | 60 N (13.5 lb) | 60 N (13.5 lb) | < 45 µm (< 0.001772") | < 40 µm (< 0.001575") | 0.04° (0.698 mrad) | 0.025° (0.436 mrad) | 0.04° (0.698 mrad) | 6.35 mm (0.25") | 4.15 kg (9.149 lb) |
| X-LRQ600AL-SV2 | 0.09921875 µm | 600 mm (23.622") | 150 µm (0.005905") | < 8 µm (< 0.000315") | 35 mm/s (1.378"/s) | 0.000061 mm/s (0.000002"/s) | 0.000061 mm/s (0.000002"/s) | 100 N (22.4 lb) | 100 N (22.4 lb) | < 75 µm (< 0.002953") | < 60 µm (< 0.002362") | 0.045° (0.785 mrad) | 0.035° (0.611 mrad) | 0.04° (0.698 mrad) | 1.27 mm (0.05") | 4.86 kg (10.714 lb) |
| X-LRQ600BL-SV2 | 0.49609375 µm | 600 mm (23.622") | 90 µm (0.003543") | < 21 µm (< 0.000827") | 205 mm/s (8.071"/s) | 0.000303 mm/s (0.000012"/s) | 0.000303 mm/s (0.000012"/s) | 60 N (13.5 lb) | 60 N (13.5 lb) | < 75 µm (< 0.002953") | < 60 µm (< 0.002362") | 0.045° (0.785 mrad) | 0.035° (0.611 mrad) | 0.04° (0.698 mrad) | 6.35 mm (0.25") | 4.86 kg (10.714 lb) |
Specification Charts & Notes
Thrust or torque is a function of speed. The values given above are maximums. These values cannot both be achieved simultaneously (i.e. at maximum speed, the unit will not produce maximum thrust).
Thrust Speed Performance


Duty Cycle

Bearing Lifetime
