Vacuum Compatible Stages
- Only 4 feedthrough wires required to control all daisy-chained positioners with built-in controllers
- Low vacuum and high vacuum positioning systems, rated to 10-3 torr (low vacuum) and 10-6 torr (high vacuum)
- Up to 600 mm travel, 100 kg load, 205 mm/s speed
High Load Options
As the name suggests, a vacuum stage or a vacuum compatible stage is defined as a motion control device specifically designed for operation in extremely low pressure environments, where outgassing of components must be minimized and convection cannot be relied on for heat dissipation.
Zaber offers a wide selection of vacuum compatible linear stages, rotary stages, vertical stages, goniometers, mirror mounts, and linear actuators, all with optional built-in controllers.
For more information about Zaber's vacuum compatible stages, read our technical article - Motion Device Design Considerations for Vacuum Applications.
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LSM Family — Compact, Screw Drive Linear Stage
Starting Price
$4,123 (USD)
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- Small form factor ideal for many desktop applications
- 25, 50, 100, 150, 200 mm travel
- Recirculating ball bearings for high load and long lifetime
- Dust cover and vacuum options available
| Shortest Travel | Longest Travel | Best Accuracy | Best Repeatability | Highest Speed | Highest Thrust | Load |
|---|---|---|---|---|---|---|
25.4 mm (1") | 203.2 mm (8") | 15 µm (0.000591") | < 3 µm (< 0.000118") | 100 mm/s (3.937"/s) | 35 N (7.8 lb) | 100 N (22.4 lb) |
LRQ Family — Moderate Load, High Stiffness, Screw Drive Linear Stage
Starting Price
$5,620 (USD)
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- Recirculating ball bearings for high load and long lifetime
- 75, 150, 300, 450, 600 mm travel
- Ball screw and lead screw options
- Inline and parallel drive configurations
| Shortest Travel | Longest Travel | Best Accuracy | Best Repeatability | Highest Speed | Highest Thrust | Load |
|---|---|---|---|---|---|---|
75 mm (2.953") | 600 mm (23.622") | 15 µm (0.000591") | < 2.5 µm (< 0.000098") | 205 mm/s (8.071"/s) | 100 N (22.4 lb) | 1000 N (224.3 lb) |
RSM Family — Ultra Compact, Worm Gear Drive Rotary Stage
Starting Price
$4,782 (USD)
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- Compact and low profile stage
- Vacuum rated versions available as standard products
- Built-in controller or motor-only models
- Motor encoder option for slip/stall detection and automatic recovery
| Best Accuracy | Best Backlash | Best Repeatability | Highest Speed | Highest Torque | Load |
|---|---|---|---|---|---|
0.14° (2.443 mrad) | < 0.04° (< 0.698 mrad) | < 0.02° (< 0.349 mrad) | 120°/s (20 rpm) | 0.2 N⋅m (0.148 lb⋅ft) | 50 N (11.2 lb) |
RSW Family — Compact Worm Gear Drive Rotary Stage
Starting Price
$4,723 (USD)
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- Two lens holders allow for use as a polarizer mount
- Vacuum rated versions available
- Built-in controller or motor-only models
- Motor encoder option for slip/stall detection and automatic recovery
| Best Accuracy | Best Backlash | Best Repeatability | Highest Speed | Load |
|---|---|---|---|---|
0.14° (2.443 mrad) | < 0.04° (< 0.698 mrad) | < 0.02° (< 0.349 mrad) | 100°/s (17 rpm) | 200 N (44.9 lb) |
VSR Family — Telescoping, Screw Drive
Starting Price
$3,584 (USD)
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- 20 or 40 mm travel
- 10 kg load capacity
- Vacuum rated versions available
- Built-in controller or motor models only
| Shortest Travel | Longest Travel | Best Accuracy | Best Backlash | Highest Speed | Highest Thrust | Load |
|---|---|---|---|---|---|---|
20 mm (0.787") | 40 mm (1.575") | 35 µm (0.001378") | < 35 µm (< 0.001378") | 48 mm/s (1.89"/s) | 200 N (44.9 lb) | 100 N (22.4 lb) |
GSM Family — Goniometers
Starting Price
$4,279 (USD)
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- 40 mm and 60 mm centre of rotation options allow for two axes of motion about a common centre of rotation
- Crossed roller bearings for smooth motion and high stiffness
- Vacuum rated versions available
- Built-in controller or motor-only models
| Range | Best Accuracy | Best Backlash | Highest Speed | Load |
|---|---|---|---|---|
+/- 10° | 0.06° (1.047 mrad) | < 0.01° (< 0.174 mrad) | 30°/s (5 rpm) | 30 N (6.7 lb) |
NA Family — Wide Selection of Sizes
Starting Price
$2,486 (USD)
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- 16, 25, 30, 50 and 60 mm travel
- Replaces standard micrometer heads on manual translation stages
- Built-in controller or motor models only
- Motor encoder option for slip/stall detection and automatic recovery
| Shortest Travel | Longest Travel | Best Accuracy | Best Backlash | Best Repeatability | Highest Speed | Highest Thrust |
|---|---|---|---|---|---|---|
25.4 mm (1") | 50.8 mm (2") | 40 µm (0.001575") | < 15 µm (< 0.000591") | < 1 µm (< 0.000039") | 25 mm/s (0.984"/s) | 25 N (5.6 lb) |
TSB-V Series — Low Vacuum Translation Stages
Starting Price
$573 (USD)
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- Vacuum compatible to 10-3 Torr
- 28 and 60 mm travel
- 10 kg load capacity
- Requires a X-NA-SV1 actuator to drive it
| Shortest Travel | Longest Travel | Load |
|---|---|---|
28 mm (1.102") | 60 mm (2.362") | 100 N (22.4 lb) |