Vacuum Compatible Stages
- Only 4 feedthrough wires required to control all daisy-chained positioners with built-in controllers
- Low vacuum and high vacuum positioning systems, rated to 10-3 torr (low vacuum) and 10-6 torr (high vacuum)
- Up to 600 mm travel, 100 kg load, 205 mm/s speed
Wide Range of Options
Easy Multi-Axis Systems
User-Friendly
Software & API
High Load Options
Plug & Play in Minutes
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Within 1 Week
As the name suggests, a vacuum stage or a vacuum compatible stage is defined as a motion control device specifically designed for operation in extremely low pressure environments, where outgassing of components must be minimized and convection cannot be relied on for heat dissipation.
Zaber offers a wide selection of vacuum compatible linear stages, rotary stages, vertical stages, goniometers, mirror mounts, and linear actuators, all with optional built-in controllers.
For more information about Zaber's vacuum compatible stages, read our technical article - Motion Device Design Considerations for Vacuum Applications.
LSM Family — Compact, Screw Drive Linear Stage
Starting Price
$4,042 (USD)
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- Small form factor ideal for many desktop applications
- 25, 50, 100, 150, 200 mm travel
- Recirculating ball bearings for high load and long lifetime
- Vacuum rated versions available
| Shortest Travel | Longest Travel | Best Accuracy | Best Repeatability | Highest Speed | Highest Thrust | Load |
|---|---|---|---|---|---|---|
25.4 mm (1.000") | 203.2 mm (8.000") | 15 µm (0.000591") | < 3 µm (< 0.000118") | 104 mm/s (4.094"/s) | 55 N (12.3 lb) | 250 N (56.1 lb) |
Above specifications are based on all models of the family, including non-vacuum models
LRQ Family — Moderate Load, High Stiffness, Screw Drive Linear Stage
Starting Price
$5,510 (USD)
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- Recirculating ball bearings for high load and long lifetime
- 75, 150, 300, 450, 600 mm travel
- Ball screw and lead screw options
- Inline and parallel drive configurations
| Shortest Travel | Longest Travel | Best Accuracy | Best Repeatability | Highest Speed | Highest Thrust | Load |
|---|---|---|---|---|---|---|
75 mm (2.953") | 600 mm (23.622") | 10 µm (0.000394") | < 2 µm (< 0.000079") | 840 mm/s (33.071"/s) | 500 N (112.1 lb) | 1000 N (224.3 lb) |
Above specifications are based on all models of the family, including non-vacuum models
RSM Family — Ultra Compact, Worm Gear Drive Rotary Stage
Starting Price
$4,688 (USD)
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- Compact and low profile stage
- Vacuum rated versions available as standard products
- Built-in controller or motor-only models
- Motor encoder option for slip/stall detection and automatic recovery
| Best Accuracy | Best Repeatability | Best Backlash | Highest Speed | Highest Torque | Load |
|---|---|---|---|---|---|
0.14° (2.443000 mrad) | < 0.02° (< 0.349 mrad) | < 0.04° (< 0.698 mrad) | 120°/s (20 rpm) | 60 N⋅cm (85.0 oz⋅in) | 50 N (11.2 lb) |
Above specifications are based on all models of the family, including non-vacuum models
RSW Family — Compact Worm Gear Drive Rotary Stage
Starting Price
$4,630 (USD)
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- Two lens holders allow for use as a polarizer mount
- Vacuum rated versions available
- Built-in controller or motor-only models
- Motor encoder option for slip/stall detection and automatic recovery
| Best Accuracy | Best Repeatability | Best Backlash | Highest Speed | Highest Torque | Load |
|---|---|---|---|---|---|
0.08° (1.396000 mrad) | < 0.02° (< 0.349 mrad) | < 0.04° (< 0.698 mrad) | 450°/s (75 rpm) | 280 N⋅cm (396.5 oz⋅in) | 200 N (44.9 lb) |
Above specifications are based on all models of the family, including non-vacuum models
VSR Family — Telescoping, Screw Drive
Starting Price
$3,514 (USD)
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- 20 or 40 mm travel
- 10 kg load capacity
- Vacuum rated versions available
- Built-in controller or motor models only
| Shortest Travel | Longest Travel | Best Accuracy | Best Backlash | Highest Speed | Highest Thrust | Load |
|---|---|---|---|---|---|---|
20 mm (0.787") | 40 mm (1.575") | 35 µm (0.001378") | < 35 µm (< 0.001378") | 55 mm/s (2.165"/s) | 200 N (44.9 lb) | 100 N (22.4 lb) |
Above specifications are based on all models of the family, including non-vacuum models
GSM Family — Goniometers
Starting Price
$4,195 (USD)
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- 40 mm and 60 mm centre of rotation options allow for two axes of motion about a common centre of rotation
- Crossed roller bearings for smooth motion and high stiffness
- Vacuum rated versions available
- Built-in controller or motor-only models
| Range | Best Accuracy | Best Backlash | Highest Speed | Load |
|---|---|---|---|---|
+/-10° | 0.06° (1.047000 mrad) | < 0.01° (< 0.174 mrad) | 30°/s (5 rpm) | 30 N (6.7 lb) |
Above specifications are based on all models of the family, including non-vacuum models
NA Family — Wide Selection of Sizes
Starting Price
$2,437 (USD)
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- 16, 25, 30, 50 and 60 mm travel
- Replaces standard micrometer heads on manual translation stages
- Built-in controller or motor models only
- Motor encoder option for slip/stall detection and automatic recovery
| Shortest Travel | Longest Travel | Best Accuracy | Best Repeatability | Best Backlash | Highest Speed | Highest Thrust |
|---|---|---|---|---|---|---|
16 mm (0.630") | 60 mm (2.362") | 20 µm (0.000787") | < 1 µm (< 0.000039") | < 15 µm (< 0.000591") | 80 mm/s (3.150"/s) | 1300 N (291.5 lb) |
Above specifications are based on all models of the family, including non-vacuum models
TSB-V Series — Low Vacuum Translation Stages
Starting Price
$562 (USD)
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- 25, 28, 50 and 60 mm travel
- 10 kg load capacity
| Shortest Travel | Longest Travel | Load |
|---|---|---|
25 mm (0.984") | 60 mm (2.362") | 100 N (22.4 lb) |
Above specifications are based on all models of the family, including non-vacuum models