| Focus Stage | X-LDA025A-AE53D12 |
| Focus Stage Encoder Resolution | 1 nm |
| Focus Stage Minimum Incremental Move | 20 nm |
| Focus Stage Repeatability | < 0.2 µm (< 0.000008") |
| Typical Focus Stage Move and Settle Time (200 nm move, < 15 nm, 165 g load) | < 25 ms |
| Typical Focus Stage Move and Settle Time (500 nm move, < 15 nm, 165 g load) | < 35 ms |
| Typical Focus Stage Move and Settle Time (1000 nm move, < 15 nm, 165 g load) | < 45 ms |
| Filter Cube Change Time | 350 ms |
| Field Number (FN) | 20 mm (0.787") |
