| Built-in Controller |  |
| Recommended Controller | X-MCC (48 V) Recommended |
| AutoDetect |  |
| Accuracy (unidirectional) | 1.5 µm (0.000059") |
| Repeatability | < 0.2 µm (< 0.000008") |
| Minimum Incremental Move | 12 nm |
| Minimum Speed | 0.61 nm/s |
| Speed Resolution | 0.61 nm/s |
| Encoder Type | Linear analog encoder |
| Encoder Count Size | 1 nm |
| Peak Thrust | 16 N (3.6 lb) |
| Maximum Continuous Thrust | 6 N (1.3 lb) |
| Maximum Moment (Roll) | 500 N⋅cm (708.1 oz⋅in) |
| Maximum Moment (Pitch) | 500 N⋅cm (708.1 oz⋅in) |
| Maximum Moment (Yaw) | 500 N⋅cm (708.1 oz⋅in) |
| Guide Type | Crossed-Roller Bearing |
| Horizontal Runout | < 4 µm (< 0.000157") |
| Pitch | 0.006° (0.105 mrad) |
| Roll | 0.005° (0.087 mrad) |
| Yaw | 0.005° (0.087 mrad) |
| Stiffness in Pitch | 500 N⋅m/° (35 µrad/N⋅m) |
| Stiffness in Roll | 500 N⋅m/° (35 µrad/N⋅m) |
| Stiffness in Yaw | 400 N⋅m/° (44 µrad/N⋅m) |
| Counterbalance Type | Adjustable Magnetic |
| Motor Type | Moving Magnet Track Linear Motor |
| Motor Rated Current | 1800 mA/phase |
| Force Constant | 3.7 N/A (0.8 lbs/A) |
| Motor Winding Resistance | 2.3 ohms/phase |
| Inductance | 0.09 mH/phase |
| Motor Connection | D-sub 26 |
| Limit or Home Sensing | Optical Index Mark |
| Axes of Motion | 1 |
| Mounting Interface | M6 threaded holes |
| Operating Temperature Range | 0 to 50 °C |
| CE Compliant | |
| Vacuum Compatible | |
| Weight | 1.26 kg (2.778 lb) |
