VSR-V2 Series
High vacuum vertical stages
Series Specifications
Download Datasheet| Microstep Size (Default Resolution) | 0.09525 µm |
| Built-in Controller | |
| Recommended Controller | MCC (48 V) Recommended |
| AutoDetect | |
| Repeatability | < 1 µm (< 0.000039") |
| Loaded Backlash (10 N) | < 10 µm (< 0.000394") |
| Backlash | < 35 µm (< 0.001378") |
| Maximum Speed | 48 mm/s (1.89"/s) |
| Minimum Speed | 0.000058 mm/s (0.000002"/s) |
| Speed Resolution | 0.000058 mm/s (0.000002"/s) |
| Peak Thrust | 200 N (44.9 lb) |
| Maximum Continuous Thrust | 100 N (22.4 lb) |
| Maximum Centered Load | 100 N (22.4 lb) |
| Maximum Moment (Pitch) | 300 N⋅cm (424.8 oz⋅in) |
| Maximum Moment (Roll) | 300 N⋅cm (424.8 oz⋅in) |
| Maximum Moment (Yaw) | 300 N⋅cm (424.8 oz⋅in) |
| Pitch | 0.08° (1.396 mrad) |
| Roll | 0.08° (1.396 mrad) |
| Yaw | 0.08° (1.396 mrad) |
| Linear Motion Per Motor Rev | 1.2192 mm (0.048") |
| Motor Steps Per Rev | 200 |
| Motor Type | Stepper (2 phase) |
| Motor Rated Current | 700 mA/phase |
| Motor Winding Inductance | 8.7 mH/phase |
| Motor Connection | Teflon flying leads with D-sub15 connector |
| Default Resolution | 1/64 of a step |
| Mechanical Drive System | Precision Lead Screw |
| Limit or Home Sensing | Magnetic home sensor |
| Manual Control | |
| Axes of Motion | 1 |
| Mounting Interface | M6 and M3 threaded holes |
| Operating Temperature Range | 0-50 °C |
| CE Compliant | |
| Vacuum Compatible | High vacuum (10-6 Torr) |
Part Specifications Comparison
| Part Number | Travel Range | Accuracy (unidirectional) | Loaded Accuracy (10 N) | Straightness of Travel | Guide Type | Weight |
|---|---|---|---|---|---|---|
| VSR20A-V2T4 | 20 mm (0.787") | 50 µm (0.001968") | 35 µm (0.001378") | < 30 µm (< 0.001181") | Ball Bearing | 0.56 kg (1.235 lb) |
| VSR40A-V2T4 | 40 mm (1.575") | 35 µm (0.001378") | 20 µm (0.000787") | < 35 µm (< 0.001378") | Crossed-Roller Bearing | 0.77 kg (1.698 lb) |
Specification Charts & Notes
Thrust or torque is a function of speed. The values given above are maximums. These values cannot both be achieved simultaneously (i.e. at maximum speed, the unit will not produce maximum thrust).
Thrust Speed Performance

Typical Accuracy

Duty Cycle
