LRQ-DE Series

High precision linear stages with built-in linear encoders

Series Specifications

Built-in Controller
Recommended Controller	MCC (48 V) recommended
AutoDetect
Travel Range	75 – 600 mm
Axes of Motion	1
Weight	2.25 – 5.14 kg

Accuracy (unidirectional)	10 – 13 µm
Repeatability	< 2 µm (< 0.000079")
Backlash	< 5 – 6.5 µm
Flatness of Travel	< 20 – 75 µm
Straightness of Travel	< 20 – 60 µm
Pitch Error	0.025 – 0.045°
Roll Error	0.01 – 0.035°
Yaw Error	0.02 – 0.04°
Microstep Size (Default Resolution)	0.09921875 – 0.49609375 µm
Default Resolution	1/64 of a step

Peak Thrust	150 – 500 N
Maximum Continuous Thrust	100 – 200 N
Back-driving Force*	Varies
Maximum Centred Load	1000 N (224.3 lb)
Maximum Moment (Pitch)	30 N⋅m (22.1 lb⋅ft)
Maximum Moment (Roll)	30 N⋅m (22.14 lb⋅ft)
Maximum Moment (Yaw)	30 N⋅m (22.14 lb⋅ft)
Stiffness (Pitch)	500 N⋅m/° (35 µrad/N⋅m)
Stiffness (Roll)	1180 N⋅m/° (15 µrad/N⋅m)
Stiffness (Yaw)	450 N⋅m/° (39 µrad/N⋅m)

Maximum Speed	54 – 270 mm/s
Minimum Speed	0.000061 – 0.000303 mm/s
Speed Resolution	0.000061 – 0.000303 mm/s

Encoder Type	Linear quadrature encoder
Encoder Resolution	50 nm
Limit or Home Sensing	Magnetic home sensor

Linear Motion Per Motor Rev	1.27 – 6.35 mm
Motor Steps Per Rev	200
Motor Type	Stepper (2 phase)
Motor Rated Current	2300 mA/phase
Motor Winding Resistance	1 ohms/phase
Motor Winding Inductance	2.2 mH/phase
Motor Connection	D-sub 26
Motor Rotor Inertia	7.3e-6 kg⋅m²

Guide Type	Recirculating ball linear guide
Mechanical Drive System	Varies
Mounting Interface	M6 and M3 threaded holes
Moving Mass	0.455 – 0.483 kg

Operating Temperature Range	0 to 50 °C
CE Compliant
Vacuum Compatible

Filter By Feature

Choose one or more options below to filter the parts table.

Travel

Drive Screw Options

Drive Configuration

Encoder Options

DE51: Linear quadrature encoder, 50 nm

Connector

T10A: D-sub 26 panel mount connector with Auto Detect

Part Specifications Comparison

Part Number	Travel Range	Weight	Accuracy (unidirectional)	Backlash	Flatness of Travel	Straightness of Travel	Pitch Error	Roll Error	Yaw Error	Microstep Size (Default Resolution)	Peak Thrust	Maximum Continuous Thrust	Back-driving Force*	Maximum Speed	Minimum Speed	Speed Resolution	Linear Motion Per Motor Rev	Mechanical Drive System	Moving Mass
LRQ075AL-DE51T10A	75 mm (2.953")	2.25 kg (4.96 lb)	10 µm (0.000394")	< 5 µm (< 0.000197")	< 20 µm (< 0.000787")	< 20 µm (< 0.000787")	0.025° (0.436 mrad)	0.01° (0.174 mrad)	0.02° (0.349 mrad)	0.09921875 µm	230 N (51.6 lb)	100 N (22.4 lb)	Non-back-driving	54 mm/s (2.126"/s)	0.000061 mm/s (0.000002"/s)	0.000061 mm/s (0.000002"/s)	1.27 mm (0.05")	Precision lead screw	0.455 kg (1.001 lbs)
LRQ075AP-DE51T10A	75 mm (2.953")	2.41 kg (5.313 lb)	10 µm (0.000394")	< 5 µm (< 0.000197")	< 20 µm (< 0.000787")	< 20 µm (< 0.000787")	0.025° (0.436 mrad)	0.01° (0.174 mrad)	0.02° (0.349 mrad)	0.09921875 µm	230 N (51.6 lb)	100 N (22.4 lb)	Non-back-driving	54 mm/s (2.126"/s)	0.000061 mm/s (0.000002"/s)	0.000061 mm/s (0.000002"/s)	1.27 mm (0.05")	Precision lead screw	0.455 kg (1.001 lbs)
LRQ075BL-DE51T10A	75 mm (2.953")	2.25 kg (4.96 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 20 µm (< 0.000787")	< 20 µm (< 0.000787")	0.025° (0.436 mrad)	0.01° (0.174 mrad)	0.02° (0.349 mrad)	0.49609375 µm	150 N (33.6 lb)	100 N (22.4 lb)	(± 30%) 93 N (20.9 lb)	270 mm/s (10.63"/s)	0.000303 mm/s (0.000012"/s)	0.000303 mm/s (0.000012"/s)	6.35 mm (0.25")	Precision lead screw	0.455 kg (1.001 lbs)
LRQ075BP-DE51T10A	75 mm (2.953")	2.41 kg (5.313 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 20 µm (< 0.000787")	< 20 µm (< 0.000787")	0.025° (0.436 mrad)	0.01° (0.174 mrad)	0.02° (0.349 mrad)	0.49609375 µm	150 N (33.6 lb)	100 N (22.4 lb)	(± 30%) 123 N (27.6 lb)	270 mm/s (10.63"/s)	0.000303 mm/s (0.000012"/s)	0.000303 mm/s (0.000012"/s)	6.35 mm (0.25")	Precision lead screw	0.455 kg (1.001 lbs)
LRQ075HL-DE51T10A	75 mm (2.953")	2.25 kg (4.96 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 20 µm (< 0.000787")	< 20 µm (< 0.000787")	0.025° (0.436 mrad)	0.01° (0.174 mrad)	0.02° (0.349 mrad)	0.1953125 µm	500 N (112.1 lb)	200 N (44.9 lb)	(± 30%) 93 N (20.9 lb)	110 mm/s (4.331"/s)	0.000119 mm/s (0.000005"/s)	0.000119 mm/s (0.000005"/s)	2.5 mm (0.098")	Precision ball screw	0.483 kg (1.063 lbs)
LRQ075HP-DE51T10A	75 mm (2.953")	2.41 kg (5.313 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 20 µm (< 0.000787")	< 20 µm (< 0.000787")	0.025° (0.436 mrad)	0.01° (0.174 mrad)	0.02° (0.349 mrad)	0.1953125 µm	500 N (112.1 lb)	200 N (44.9 lb)	(± 30%) 123 N (27.6 lb)	110 mm/s (4.331"/s)	0.000119 mm/s (0.000005"/s)	0.000119 mm/s (0.000005"/s)	2.5 mm (0.098")	Precision ball screw	0.483 kg (1.063 lbs)
LRQ150AL-DE51T10A	150 mm (5.905")	2.64 kg (5.82 lb)	10 µm (0.000394")	< 5 µm (< 0.000197")	< 25 µm (< 0.000984")	< 20 µm (< 0.000787")	0.03° (0.523 mrad)	0.015° (0.262 mrad)	0.02° (0.349 mrad)	0.09921875 µm	230 N (51.6 lb)	100 N (22.4 lb)	Non-back-driving	54 mm/s (2.126"/s)	0.000061 mm/s (0.000002"/s)	0.000061 mm/s (0.000002"/s)	1.27 mm (0.05")	Precision lead screw	0.455 kg (1.001 lbs)
LRQ150AP-DE51T10A	150 mm (5.905")	2.8 kg (6.173 lb)	10 µm (0.000394")	< 5 µm (< 0.000197")	< 25 µm (< 0.000984")	< 20 µm (< 0.000787")	0.03° (0.523 mrad)	0.015° (0.262 mrad)	0.02° (0.349 mrad)	0.09921875 µm	230 N (51.6 lb)	100 N (22.4 lb)	Non-back-driving	54 mm/s (2.126"/s)	0.000061 mm/s (0.000002"/s)	0.000061 mm/s (0.000002"/s)	1.27 mm (0.05")	Precision lead screw	0.455 kg (1.001 lbs)
LRQ150BL-DE51T10A	150 mm (5.905")	2.64 kg (5.82 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 25 µm (< 0.000984")	< 20 µm (< 0.000787")	0.03° (0.523 mrad)	0.015° (0.262 mrad)	0.02° (0.349 mrad)	0.49609375 µm	150 N (33.6 lb)	100 N (22.4 lb)	(± 30%) 93 N (20.9 lb)	270 mm/s (10.63"/s)	0.000303 mm/s (0.000012"/s)	0.000303 mm/s (0.000012"/s)	6.35 mm (0.25")	Precision lead screw	0.456 kg (1.003 lbs)
LRQ150BP-DE51T10A	150 mm (5.905")	2.8 kg (6.173 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 25 µm (< 0.000984")	< 20 µm (< 0.000787")	0.03° (0.523 mrad)	0.015° (0.262 mrad)	0.02° (0.349 mrad)	0.49609375 µm	150 N (33.6 lb)	100 N (22.4 lb)	(± 30%) 123 N (27.6 lb)	270 mm/s (10.63"/s)	0.000303 mm/s (0.000012"/s)	0.000303 mm/s (0.000012"/s)	6.35 mm (0.25")	Precision lead screw	0.456 kg (1.003 lbs)
LRQ150HL-DE51T10A	150 mm (5.905")	2.64 kg (5.82 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 25 µm (< 0.000984")	< 20 µm (< 0.000787")	0.03° (0.523 mrad)	0.015° (0.262 mrad)	0.02° (0.349 mrad)	0.1953125 µm	500 N (112.1 lb)	200 N (44.9 lb)	(± 30%) 93 N (20.9 lb)	110 mm/s (4.331"/s)	0.000119 mm/s (0.000005"/s)	0.000119 mm/s (0.000005"/s)	2.5 mm (0.098")	Precision ball screw	0.483 kg (1.063 lbs)
LRQ150HP-DE51T10A	150 mm (5.905")	2.8 kg (6.173 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 25 µm (< 0.000984")	< 20 µm (< 0.000787")	0.03° (0.523 mrad)	0.015° (0.262 mrad)	0.02° (0.349 mrad)	0.1953125 µm	500 N (112.1 lb)	200 N (44.9 lb)	(± 30%) 123 N (27.6 lb)	110 mm/s (4.331"/s)	0.000119 mm/s (0.000005"/s)	0.000119 mm/s (0.000005"/s)	2.5 mm (0.098")	Precision ball screw	0.483 kg (1.063 lbs)
LRQ300AL-DE51T10A	300 mm (11.811")	3.44 kg (7.584 lb)	10 µm (0.000394")	< 5 µm (< 0.000197")	< 35 µm (< 0.001378")	< 30 µm (< 0.001181")	0.034° (0.593 mrad)	0.015° (0.262 mrad)	0.03° (0.523 mrad)	0.09921875 µm	230 N (51.6 lb)	100 N (22.4 lb)	Non-back-driving	54 mm/s (2.126"/s)	0.000061 mm/s (0.000002"/s)	0.000061 mm/s (0.000002"/s)	1.27 mm (0.05")	Precision lead screw	0.455 kg (1.001 lbs)
LRQ300AP-DE51T10A	300 mm (11.811")	3.6 kg (7.937 lb)	10 µm (0.000394")	< 5 µm (< 0.000197")	< 35 µm (< 0.001378")	< 30 µm (< 0.001181")	0.034° (0.593 mrad)	0.015° (0.262 mrad)	0.03° (0.523 mrad)	0.09921875 µm	230 N (51.6 lb)	100 N (22.4 lb)	Non-back-driving	54 mm/s (2.126"/s)	0.000061 mm/s (0.000002"/s)	0.000061 mm/s (0.000002"/s)	1.27 mm (0.05")	Precision lead screw	0.455 kg (1.001 lbs)
LRQ300BL-DE51T10A	300 mm (11.811")	3.44 kg (7.584 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 35 µm (< 0.001378")	< 30 µm (< 0.001181")	0.034° (0.593 mrad)	0.015° (0.262 mrad)	0.03° (0.523 mrad)	0.49609375 µm	150 N (33.6 lb)	100 N (22.4 lb)	(± 30%) 93 N (20.9 lb)	270 mm/s (10.63"/s)	0.000303 mm/s (0.000012"/s)	0.000303 mm/s (0.000012"/s)	6.35 mm (0.25")	Precision lead screw	0.456 kg (1.003 lbs)
LRQ300BP-DE51T10A	300 mm (11.811")	3.6 kg (7.937 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 35 µm (< 0.001378")	< 30 µm (< 0.001181")	0.034° (0.593 mrad)	0.015° (0.262 mrad)	0.03° (0.523 mrad)	0.49609375 µm	150 N (33.6 lb)	100 N (22.4 lb)	(± 30%) 123 N (27.6 lb)	270 mm/s (10.63"/s)	0.000303 mm/s (0.000012"/s)	0.000303 mm/s (0.000012"/s)	6.35 mm (0.25")	Precision lead screw	0.456 kg (1.003 lbs)
LRQ300HL-DE51T10A	300 mm (11.811")	3.44 kg (7.584 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 35 µm (< 0.001378")	< 30 µm (< 0.001181")	0.034° (0.593 mrad)	0.015° (0.262 mrad)	0.03° (0.523 mrad)	0.1953125 µm	500 N (112.1 lb)	200 N (44.9 lb)	(± 30%) 93 N (20.9 lb)	110 mm/s (4.331"/s)	0.000119 mm/s (0.000005"/s)	0.000119 mm/s (0.000005"/s)	2.5 mm (0.098")	Precision ball screw	0.483 kg (1.063 lbs)
LRQ300HP-DE51T10A	300 mm (11.811")	3.6 kg (7.937 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 35 µm (< 0.001378")	< 30 µm (< 0.001181")	0.034° (0.593 mrad)	0.015° (0.262 mrad)	0.03° (0.523 mrad)	0.1953125 µm	500 N (112.1 lb)	200 N (44.9 lb)	(± 30%) 123 N (27.6 lb)	110 mm/s (4.331"/s)	0.000119 mm/s (0.000005"/s)	0.000119 mm/s (0.000005"/s)	2.5 mm (0.098")	Precision ball screw	0.483 kg (1.063 lbs)
LRQ450AL-DE51T10A	450 mm (17.716")	4.23 kg (9.326 lb)	10 µm (0.000394")	< 5 µm (< 0.000197")	< 45 µm (< 0.001772")	< 40 µm (< 0.001575")	0.04° (0.698 mrad)	0.025° (0.436 mrad)	0.04° (0.698 mrad)	0.09921875 µm	230 N (51.6 lb)	100 N (22.4 lb)	Non-back-driving	54 mm/s (2.126"/s)	0.000061 mm/s (0.000002"/s)	0.000061 mm/s (0.000002"/s)	1.27 mm (0.05")	Precision lead screw	0.455 kg (1.001 lbs)
LRQ450AP-DE51T10A	450 mm (17.716")	4.39 kg (9.678 lb)	10 µm (0.000394")	< 5 µm (< 0.000197")	< 45 µm (< 0.001772")	< 40 µm (< 0.001575")	0.04° (0.698 mrad)	0.025° (0.436 mrad)	0.04° (0.698 mrad)	0.09921875 µm	230 N (51.6 lb)	100 N (22.4 lb)	Non-back-driving	54 mm/s (2.126"/s)	0.000061 mm/s (0.000002"/s)	0.000061 mm/s (0.000002"/s)	1.27 mm (0.05")	Precision lead screw	0.455 kg (1.001 lbs)
LRQ450BL-DE51T10A	450 mm (17.716")	4.23 kg (9.326 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 45 µm (< 0.001772")	< 40 µm (< 0.001575")	0.04° (0.698 mrad)	0.025° (0.436 mrad)	0.04° (0.698 mrad)	0.49609375 µm	150 N (33.6 lb)	100 N (22.4 lb)	(± 30%) 93 N (20.9 lb)	270 mm/s (10.63"/s)	0.000303 mm/s (0.000012"/s)	0.000303 mm/s (0.000012"/s)	6.35 mm (0.25")	Precision lead screw	0.456 kg (1.003 lbs)
LRQ450BP-DE51T10A	450 mm (17.716")	4.39 kg (9.678 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 45 µm (< 0.001772")	< 40 µm (< 0.001575")	0.04° (0.698 mrad)	0.025° (0.436 mrad)	0.04° (0.698 mrad)	0.49609375 µm	150 N (33.6 lb)	100 N (22.4 lb)	(± 30%) 123 N (27.6 lb)	270 mm/s (10.63"/s)	0.000303 mm/s (0.000012"/s)	0.000303 mm/s (0.000012"/s)	6.35 mm (0.25")	Precision lead screw	0.456 kg (1.003 lbs)
LRQ450HL-DE51T10A	450 mm (17.716")	4.23 kg (9.326 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 45 µm (< 0.001772")	< 40 µm (< 0.001575")	0.04° (0.698 mrad)	0.025° (0.436 mrad)	0.04° (0.698 mrad)	0.1953125 µm	500 N (112.1 lb)	200 N (44.9 lb)	(± 30%) 93 N (20.9 lb)	110 mm/s (4.331"/s)	0.000119 mm/s (0.000005"/s)	0.000119 mm/s (0.000005"/s)	2.5 mm (0.098")	Precision ball screw	0.483 kg (1.063 lbs)
LRQ450HP-DE51T10A	450 mm (17.716")	4.39 kg (9.678 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 45 µm (< 0.001772")	< 40 µm (< 0.001575")	0.04° (0.698 mrad)	0.025° (0.436 mrad)	0.04° (0.698 mrad)	0.1953125 µm	500 N (112.1 lb)	200 N (44.9 lb)	(± 30%) 123 N (27.6 lb)	110 mm/s (4.331"/s)	0.000119 mm/s (0.000005"/s)	0.000119 mm/s (0.000005"/s)	2.5 mm (0.098")	Precision ball screw	0.483 kg (1.063 lbs)
LRQ600AL-DE51T10A	600 mm (23.622")	4.98 kg (10.979 lb)	10 µm (0.000394")	< 5 µm (< 0.000197")	< 75 µm (< 0.002953")	< 60 µm (< 0.002362")	0.045° (0.785 mrad)	0.035° (0.611 mrad)	0.04° (0.698 mrad)	0.09921875 µm	230 N (51.6 lb)	100 N (22.4 lb)	Non-back-driving	54 mm/s (2.126"/s)	0.000061 mm/s (0.000002"/s)	0.000061 mm/s (0.000002"/s)	1.27 mm (0.05")	Precision lead screw	0.455 kg (1.001 lbs)
LRQ600AP-DE51T10A	600 mm (23.622")	5.14 kg (11.332 lb)	10 µm (0.000394")	< 5 µm (< 0.000197")	< 75 µm (< 0.002953")	< 60 µm (< 0.002362")	0.045° (0.785 mrad)	0.035° (0.611 mrad)	0.04° (0.698 mrad)	0.09921875 µm	230 N (51.6 lb)	100 N (22.4 lb)	Non-back-driving	54 mm/s (2.126"/s)	0.000061 mm/s (0.000002"/s)	0.000061 mm/s (0.000002"/s)	1.27 mm (0.05")	Precision lead screw	0.455 kg (1.001 lbs)
LRQ600BL-DE51T10A	600 mm (23.622")	4.98 kg (10.979 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 75 µm (< 0.002953")	< 60 µm (< 0.002362")	0.045° (0.785 mrad)	0.035° (0.611 mrad)	0.04° (0.698 mrad)	0.49609375 µm	150 N (33.6 lb)	100 N (22.4 lb)	(± 30%) 93 N (20.9 lb)	270 mm/s (10.63"/s)	0.000303 mm/s (0.000012"/s)	0.000303 mm/s (0.000012"/s)	6.35 mm (0.25")	Precision lead screw	0.456 kg (1.003 lbs)
LRQ600BP-DE51T10A	600 mm (23.622")	5.14 kg (11.332 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 75 µm (< 0.002953")	< 60 µm (< 0.002362")	0.045° (0.785 mrad)	0.035° (0.611 mrad)	0.04° (0.698 mrad)	0.49609375 µm	150 N (33.6 lb)	100 N (22.4 lb)	(± 30%) 123 N (27.6 lb)	270 mm/s (10.63"/s)	0.000303 mm/s (0.000012"/s)	0.000303 mm/s (0.000012"/s)	6.35 mm (0.25")	Precision lead screw	0.456 kg (1.003 lbs)
LRQ600HL-DE51T10A	600 mm (23.622")	4.98 kg (10.979 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 75 µm (< 0.002953")	< 60 µm (< 0.002362")	0.045° (0.785 mrad)	0.035° (0.611 mrad)	0.04° (0.698 mrad)	0.1953125 µm	500 N (112.1 lb)	200 N (44.9 lb)	(± 30%) 93 N (20.9 lb)	110 mm/s (4.331"/s)	0.000119 mm/s (0.000005"/s)	0.000119 mm/s (0.000005"/s)	2.5 mm (0.098")	Precision ball screw	0.483 kg (1.063 lbs)
LRQ600HP-DE51T10A	600 mm (23.622")	5.14 kg (11.332 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 75 µm (< 0.002953")	< 60 µm (< 0.002362")	0.045° (0.785 mrad)	0.035° (0.611 mrad)	0.04° (0.698 mrad)	0.1953125 µm	500 N (112.1 lb)	200 N (44.9 lb)	(± 30%) 123 N (27.6 lb)	110 mm/s (4.331"/s)	0.000119 mm/s (0.000005"/s)	0.000119 mm/s (0.000005"/s)	2.5 mm (0.098")	Precision ball screw	0.483 kg (1.063 lbs)

Specification Charts & Notes

Thrust or torque is a function of speed. The values given above are maximums. These values cannot both be achieved simultaneously (i.e. at maximum speed, the unit will not produce maximum thrust).