X-LRQ-DEC Series

High precision stages with built-in controllers, linear encoders, and dust covers

Series Specifications

Built-in Controller
Travel Range	75 – 600 mm
Manual Control	Indexed knob with push switch
Axes of Motion	1
LED Indicators
Weight	2.51 – 5.58 kg

Accuracy (unidirectional)	10 – 13 µm
Repeatability	< 2 µm (< 0.000079")
Backlash	< 5 – < 6.5 µm
Flatness of Travel	< 20 – < 75 µm
Straightness of Travel	< 20 – < 60 µm
Pitch Error	0.025 – 0.045°
Roll Error	0.01 – 0.035°
Yaw Error	0.02 – 0.04°
Microstep Size (Default Resolution)	0.09921875 – 0.49609375 µm
Default Resolution	1/64 of a step

Peak Thrust	150 – 500 N
Maximum Continuous Thrust	100 – 200 N
Back-driving Force*	Varies
Maximum Centered Load	1000 N (224.3 lb)
Maximum Moment (Pitch)	30 N⋅m (22.1 lb⋅ft)
Maximum Moment (Roll)	30 N⋅m (22.14 lb⋅ft)
Maximum Moment (Yaw)	30 N⋅m (22.14 lb⋅ft)
Stiffness (Pitch)	250 N⋅m/° (70 µrad/N⋅m)
Stiffness (Roll)	600 N⋅m/° (29 µrad/N⋅m)
Stiffness (Yaw)	430 N⋅m/° (41 µrad/N⋅m)

Maximum Speed	54 – 270 mm/s
Minimum Speed	0.000061 – 0.000303 mm/s
Speed Resolution	0.000061 – 0.000303 mm/s

Encoder Type	Linear quadrature encoder
Encoder Resolution	50 nm
Limit or Home Sensing	Magnetic home sensor

Linear Motion Per Motor Rev	1.27 – 6.35 mm
Motor Steps Per Rev	200
Motor Type	Stepper (2 phase)
Motor Rated Current	2300 mA/phase
Motor Winding Inductance	2.8 mH/phase

Communication Interface	RS-232
Communication Protocol	Zaber ASCII (Default), Zaber Binary
Data Cable Connection	Locking 4-pin M8
Power Supply	24-48 VDC
Power Plug	2-pin screw terminal
Maximum Current Draw	1900 mA

Guide Type	Recirculating Ball Linear Guide
Mechanical Drive System	Varies
Mounting Interface	M6 and M3 threaded holes

Operating Temperature Range	0 to 50 °C
CE Compliant
Vacuum Compatible

Filter By Feature

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Travel

Drive Screw Options

Drive Configuration

Encoder Options

DE51: Linear quadrature encoder, 50 nm

Cover

C: Stainless Steel Dust Cover

Part Specifications Comparison

Part Number	Travel Range	Weight	Accuracy (unidirectional)	Backlash	Flatness of Travel	Straightness of Travel	Pitch Error	Roll Error	Yaw Error	Microstep Size (Default Resolution)	Peak Thrust	Maximum Continuous Thrust	Back-driving Force*	Maximum Speed	Minimum Speed	Speed Resolution	Linear Motion Per Motor Rev	Mechanical Drive System
X-LRQ075AL-DE51C	75 mm (2.953")	2.51 kg (5.534 lb)	10 µm (0.000394")	< 5 µm (< 0.000197")	< 20 µm (< 0.000787")	< 20 µm (< 0.000787")	0.025° (0.436 mrad)	0.01° (0.174 mrad)	0.02° (0.349 mrad)	0.09921875 µm	230 N (51.6 lb)	100 N (22.4 lb)	Non-back-driving	54 mm/s (2.126"/s)	0.000061 mm/s (0.000002"/s)	0.000061 mm/s (0.000002"/s)	1.27 mm (0.05")	Precision lead screw
X-LRQ075AP-DE51C	75 mm (2.953")	2.68 kg (5.908 lb)	10 µm (0.000394")	< 5 µm (< 0.000197")	< 20 µm (< 0.000787")	< 20 µm (< 0.000787")	0.025° (0.436 mrad)	0.01° (0.174 mrad)	0.02° (0.349 mrad)	0.09921875 µm	230 N (51.6 lb)	100 N (22.4 lb)	Non-back-driving	54 mm/s (2.126"/s)	0.000061 mm/s (0.000002"/s)	0.000061 mm/s (0.000002"/s)	1.27 mm (0.05")	Precision lead screw
X-LRQ075BL-DE51C	75 mm (2.953")	2.51 kg (5.534 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 20 µm (< 0.000787")	< 20 µm (< 0.000787")	0.025° (0.436 mrad)	0.01° (0.174 mrad)	0.02° (0.349 mrad)	0.49609375 µm	150 N (33.6 lb)	100 N (22.4 lb)	(± 30%) 106 N (23.8 lb)	270 mm/s (10.63"/s)	0.000303 mm/s (0.000012"/s)	0.000303 mm/s (0.000012"/s)	6.35 mm (0.25")	Precision lead screw
X-LRQ075BP-DE51C	75 mm (2.953")	2.68 kg (5.908 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 20 µm (< 0.000787")	< 20 µm (< 0.000787")	0.025° (0.436 mrad)	0.01° (0.174 mrad)	0.02° (0.349 mrad)	0.49609375 µm	150 N (33.6 lb)	100 N (22.4 lb)	(± 30%) 136 N (30.5 lb)	270 mm/s (10.63"/s)	0.000303 mm/s (0.000012"/s)	0.000303 mm/s (0.000012"/s)	6.35 mm (0.25")	Precision lead screw
X-LRQ075HL-DE51C	75 mm (2.953")	2.51 kg (5.534 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 20 µm (< 0.000787")	< 20 µm (< 0.000787")	0.025° (0.436 mrad)	0.01° (0.174 mrad)	0.02° (0.349 mrad)	0.1953125 µm	500 N (112.1 lb)	200 N (44.9 lb)	(± 30%) 106 N (23.8 lb)	110 mm/s (4.331"/s)	0.000119 mm/s (0.000005"/s)	0.000119 mm/s (0.000005"/s)	2.5 mm (0.098")	Precision ball screw
X-LRQ075HP-DE51C	75 mm (2.953")	2.68 kg (5.908 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 20 µm (< 0.000787")	< 20 µm (< 0.000787")	0.025° (0.436 mrad)	0.01° (0.174 mrad)	0.02° (0.349 mrad)	0.1953125 µm	500 N (112.1 lb)	200 N (44.9 lb)	(± 30%) 136 N (30.5 lb)	110 mm/s (4.331"/s)	0.000119 mm/s (0.000005"/s)	0.000119 mm/s (0.000005"/s)	2.5 mm (0.098")	Precision ball screw
X-LRQ150AL-DE51C	150 mm (5.905")	2.93 kg (6.46 lb)	10 µm (0.000394")	< 5 µm (< 0.000197")	< 25 µm (< 0.000984")	< 20 µm (< 0.000787")	0.03° (0.523 mrad)	0.015° (0.262 mrad)	0.02° (0.349 mrad)	0.09921875 µm	230 N (51.6 lb)	100 N (22.4 lb)	Non-back-driving	54 mm/s (2.126"/s)	0.000061 mm/s (0.000002"/s)	0.000061 mm/s (0.000002"/s)	1.27 mm (0.05")	Precision lead screw
X-LRQ150AP-DE51C	150 mm (5.905")	3.1 kg (6.834 lb)	10 µm (0.000394")	< 5 µm (< 0.000197")	< 25 µm (< 0.000984")	< 20 µm (< 0.000787")	0.03° (0.523 mrad)	0.015° (0.262 mrad)	0.02° (0.349 mrad)	0.09921875 µm	230 N (51.6 lb)	100 N (22.4 lb)	Non-back-driving	54 mm/s (2.126"/s)	0.000061 mm/s (0.000002"/s)	0.000061 mm/s (0.000002"/s)	1.27 mm (0.05")	Precision lead screw
X-LRQ150BL-DE51C	150 mm (5.905")	2.93 kg (6.46 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 25 µm (< 0.000984")	< 20 µm (< 0.000787")	0.03° (0.523 mrad)	0.015° (0.262 mrad)	0.02° (0.349 mrad)	0.49609375 µm	150 N (33.6 lb)	100 N (22.4 lb)	(± 30%) 106 N (23.8 lb)	270 mm/s (10.63"/s)	0.000303 mm/s (0.000012"/s)	0.000303 mm/s (0.000012"/s)	6.35 mm (0.25")	Precision lead screw
X-LRQ150BP-DE51C	150 mm (5.905")	3.1 kg (6.834 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 25 µm (< 0.000984")	< 20 µm (< 0.000787")	0.03° (0.523 mrad)	0.015° (0.262 mrad)	0.02° (0.349 mrad)	0.49609375 µm	150 N (33.6 lb)	100 N (22.4 lb)	(± 30%) 136 N (30.5 lb)	270 mm/s (10.63"/s)	0.000303 mm/s (0.000012"/s)	0.000303 mm/s (0.000012"/s)	6.35 mm (0.25")	Precision lead screw
X-LRQ150HL-DE51C	150 mm (5.905")	2.93 kg (6.46 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 25 µm (< 0.000984")	< 20 µm (< 0.000787")	0.03° (0.523 mrad)	0.015° (0.262 mrad)	0.02° (0.349 mrad)	0.1953125 µm	500 N (112.1 lb)	200 N (44.9 lb)	(± 30%) 106 N (23.8 lb)	110 mm/s (4.331"/s)	0.000119 mm/s (0.000005"/s)	0.000119 mm/s (0.000005"/s)	2.5 mm (0.098")	Precision ball screw
X-LRQ150HP-DE51C	150 mm (5.905")	3.1 kg (6.834 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 25 µm (< 0.000984")	< 20 µm (< 0.000787")	0.03° (0.523 mrad)	0.015° (0.262 mrad)	0.02° (0.349 mrad)	0.1953125 µm	500 N (112.1 lb)	200 N (44.9 lb)	(± 30%) 136 N (30.5 lb)	110 mm/s (4.331"/s)	0.000119 mm/s (0.000005"/s)	0.000119 mm/s (0.000005"/s)	2.5 mm (0.098")	Precision ball screw
X-LRQ300AL-DE51C	300 mm (11.811")	3.77 kg (8.311 lb)	10 µm (0.000394")	< 5 µm (< 0.000197")	< 35 µm (< 0.001378")	< 30 µm (< 0.001181")	0.034° (0.593 mrad)	0.015° (0.262 mrad)	0.03° (0.523 mrad)	0.09921875 µm	230 N (51.6 lb)	100 N (22.4 lb)	Non-back-driving	54 mm/s (2.126"/s)	0.000061 mm/s (0.000002"/s)	0.000061 mm/s (0.000002"/s)	1.27 mm (0.05")	Precision lead screw
X-LRQ300AP-DE51C	300 mm (11.811")	3.95 kg (8.708 lb)	10 µm (0.000394")	< 5 µm (< 0.000197")	< 35 µm (< 0.001378")	< 30 µm (< 0.001181")	0.034° (0.593 mrad)	0.015° (0.262 mrad)	0.03° (0.523 mrad)	0.09921875 µm	230 N (51.6 lb)	100 N (22.4 lb)	Non-back-driving	54 mm/s (2.126"/s)	0.000061 mm/s (0.000002"/s)	0.000061 mm/s (0.000002"/s)	1.27 mm (0.05")	Precision lead screw
X-LRQ300BL-DE51C	300 mm (11.811")	3.77 kg (8.311 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 35 µm (< 0.001378")	< 30 µm (< 0.001181")	0.034° (0.593 mrad)	0.015° (0.262 mrad)	0.03° (0.523 mrad)	0.49609375 µm	150 N (33.6 lb)	100 N (22.4 lb)	(± 30%) 106 N (23.8 lb)	270 mm/s (10.63"/s)	0.000303 mm/s (0.000012"/s)	0.000303 mm/s (0.000012"/s)	6.35 mm (0.25")	Precision lead screw
X-LRQ300BP-DE51C	300 mm (11.811")	3.95 kg (8.708 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 35 µm (< 0.001378")	< 30 µm (< 0.001181")	0.034° (0.593 mrad)	0.015° (0.262 mrad)	0.03° (0.523 mrad)	0.49609375 µm	150 N (33.6 lb)	100 N (22.4 lb)	(± 30%) 136 N (30.5 lb)	270 mm/s (10.63"/s)	0.000303 mm/s (0.000012"/s)	0.000303 mm/s (0.000012"/s)	6.35 mm (0.25")	Precision lead screw
X-LRQ300HL-DE51C	300 mm (11.811")	3.77 kg (8.311 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 35 µm (< 0.001378")	< 30 µm (< 0.001181")	0.034° (0.593 mrad)	0.015° (0.262 mrad)	0.03° (0.523 mrad)	0.1953125 µm	500 N (112.1 lb)	200 N (44.9 lb)	(± 30%) 106 N (23.8 lb)	110 mm/s (4.331"/s)	0.000119 mm/s (0.000005"/s)	0.000119 mm/s (0.000005"/s)	2.5 mm (0.098")	Precision ball screw
X-LRQ300HP-DE51C	300 mm (11.811")	3.95 kg (8.708 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 35 µm (< 0.001378")	< 30 µm (< 0.001181")	0.034° (0.593 mrad)	0.015° (0.262 mrad)	0.03° (0.523 mrad)	0.1953125 µm	500 N (112.1 lb)	200 N (44.9 lb)	(± 30%) 136 N (30.5 lb)	110 mm/s (4.331"/s)	0.000119 mm/s (0.000005"/s)	0.000119 mm/s (0.000005"/s)	2.5 mm (0.098")	Precision ball screw
X-LRQ450AL-DE51C	450 mm (17.716")	4.61 kg (10.163 lb)	10 µm (0.000394")	< 5 µm (< 0.000197")	< 45 µm (< 0.001772")	< 40 µm (< 0.001575")	0.04° (0.698 mrad)	0.025° (0.436 mrad)	0.04° (0.698 mrad)	0.09921875 µm	230 N (51.6 lb)	100 N (22.4 lb)	Non-back-driving	54 mm/s (2.126"/s)	0.000061 mm/s (0.000002"/s)	0.000061 mm/s (0.000002"/s)	1.27 mm (0.05")	Precision lead screw
X-LRQ450AP-DE51C	450 mm (17.716")	4.78 kg (10.538 lb)	10 µm (0.000394")	< 5 µm (< 0.000197")	< 45 µm (< 0.001772")	< 40 µm (< 0.001575")	0.04° (0.698 mrad)	0.025° (0.436 mrad)	0.04° (0.698 mrad)	0.09921875 µm	230 N (51.6 lb)	100 N (22.4 lb)	Non-back-driving	54 mm/s (2.126"/s)	0.000061 mm/s (0.000002"/s)	0.000061 mm/s (0.000002"/s)	1.27 mm (0.05")	Precision lead screw
X-LRQ450BL-DE51C	450 mm (17.716")	4.61 kg (10.163 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 45 µm (< 0.001772")	< 40 µm (< 0.001575")	0.04° (0.698 mrad)	0.025° (0.436 mrad)	0.04° (0.698 mrad)	0.49609375 µm	150 N (33.6 lb)	100 N (22.4 lb)	(± 30%) 106 N (23.8 lb)	270 mm/s (10.63"/s)	0.000303 mm/s (0.000012"/s)	0.000303 mm/s (0.000012"/s)	6.35 mm (0.25")	Precision lead screw
X-LRQ450BP-DE51C	450 mm (17.716")	4.78 kg (10.538 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 45 µm (< 0.001772")	< 40 µm (< 0.001575")	0.04° (0.698 mrad)	0.025° (0.436 mrad)	0.04° (0.698 mrad)	0.49609375 µm	150 N (33.6 lb)	100 N (22.4 lb)	(± 30%) 136 N (30.5 lb)	270 mm/s (10.63"/s)	0.000303 mm/s (0.000012"/s)	0.000303 mm/s (0.000012"/s)	6.35 mm (0.25")	Precision lead screw
X-LRQ450HL-DE51C	450 mm (17.716")	4.61 kg (10.163 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 45 µm (< 0.001772")	< 40 µm (< 0.001575")	0.04° (0.698 mrad)	0.025° (0.436 mrad)	0.04° (0.698 mrad)	0.1953125 µm	500 N (112.1 lb)	200 N (44.9 lb)	(± 30%) 106 N (23.8 lb)	110 mm/s (4.331"/s)	0.000119 mm/s (0.000005"/s)	0.000119 mm/s (0.000005"/s)	2.5 mm (0.098")	Precision ball screw
X-LRQ450HP-DE51C	450 mm (17.716")	4.78 kg (10.538 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 45 µm (< 0.001772")	< 40 µm (< 0.001575")	0.04° (0.698 mrad)	0.025° (0.436 mrad)	0.04° (0.698 mrad)	0.1953125 µm	500 N (112.1 lb)	200 N (44.9 lb)	(± 30%) 136 N (30.5 lb)	110 mm/s (4.331"/s)	0.000119 mm/s (0.000005"/s)	0.000119 mm/s (0.000005"/s)	2.5 mm (0.098")	Precision ball screw
X-LRQ600AL-DE51C	600 mm (23.622")	5.41 kg (11.927 lb)	10 µm (0.000394")	< 5 µm (< 0.000197")	< 75 µm (< 0.002953")	< 60 µm (< 0.002362")	0.045° (0.785 mrad)	0.035° (0.611 mrad)	0.04° (0.698 mrad)	0.09921875 µm	230 N (51.6 lb)	100 N (22.4 lb)	Non-back-driving	54 mm/s (2.126"/s)	0.000061 mm/s (0.000002"/s)	0.000061 mm/s (0.000002"/s)	1.27 mm (0.05")	Precision lead screw
X-LRQ600AP-DE51C	600 mm (23.622")	5.58 kg (12.302 lb)	10 µm (0.000394")	< 5 µm (< 0.000197")	< 75 µm (< 0.002953")	< 60 µm (< 0.002362")	0.045° (0.785 mrad)	0.035° (0.611 mrad)	0.04° (0.698 mrad)	0.09921875 µm	230 N (51.6 lb)	100 N (22.4 lb)	Non-back-driving	54 mm/s (2.126"/s)	0.000061 mm/s (0.000002"/s)	0.000061 mm/s (0.000002"/s)	1.27 mm (0.05")	Precision lead screw
X-LRQ600BL-DE51C	600 mm (23.622")	5.41 kg (11.927 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 75 µm (< 0.002953")	< 60 µm (< 0.002362")	0.045° (0.785 mrad)	0.035° (0.611 mrad)	0.04° (0.698 mrad)	0.49609375 µm	150 N (33.6 lb)	100 N (22.4 lb)	(± 30%) 106 N (23.8 lb)	270 mm/s (10.63"/s)	0.000303 mm/s (0.000012"/s)	0.000303 mm/s (0.000012"/s)	6.35 mm (0.25")	Precision lead screw
X-LRQ600BP-DE51C	600 mm (23.622")	5.58 kg (12.302 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 75 µm (< 0.002953")	< 60 µm (< 0.002362")	0.045° (0.785 mrad)	0.035° (0.611 mrad)	0.04° (0.698 mrad)	0.49609375 µm	150 N (33.6 lb)	100 N (22.4 lb)	(± 30%) 136 N (30.5 lb)	270 mm/s (10.63"/s)	0.000303 mm/s (0.000012"/s)	0.000303 mm/s (0.000012"/s)	6.35 mm (0.25")	Precision lead screw
X-LRQ600HL-DE51C	600 mm (23.622")	5.41 kg (11.927 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 75 µm (< 0.002953")	< 60 µm (< 0.002362")	0.045° (0.785 mrad)	0.035° (0.611 mrad)	0.04° (0.698 mrad)	0.1953125 µm	500 N (112.1 lb)	200 N (44.9 lb)	(± 30%) 106 N (23.8 lb)	110 mm/s (4.331"/s)	0.000119 mm/s (0.000005"/s)	0.000119 mm/s (0.000005"/s)	2.5 mm (0.098")	Precision ball screw
X-LRQ600HP-DE51C	600 mm (23.622")	5.58 kg (12.302 lb)	13 µm (0.000512")	< 6.5 µm (< 0.000256")	< 75 µm (< 0.002953")	< 60 µm (< 0.002362")	0.045° (0.785 mrad)	0.035° (0.611 mrad)	0.04° (0.698 mrad)	0.1953125 µm	500 N (112.1 lb)	200 N (44.9 lb)	(± 30%) 136 N (30.5 lb)	110 mm/s (4.331"/s)	0.000119 mm/s (0.000005"/s)	0.000119 mm/s (0.000005"/s)	2.5 mm (0.098")	Precision ball screw

Specification Charts & Notes

Thrust or torque is a function of speed. The values given above are maximums. These values cannot both be achieved simultaneously (i.e. at maximum speed, the unit will not produce maximum thrust).