X-LSM-SV2 Series
High vacuum miniature motorized linear stages with built-in controllers
Custom Ultra High Vacuum, Motorized Linear Bellows Stage
In this custom application for a customer an X-LRQ-EC stage has been mated to a 2.75 inch conflat, edge welded bellows. The combination allows for 100 mm of linear travel in an ultra high vacuum (UHV) environment with stage and all electronics mounted external to the vacuum chamber. Reaching pressures as low as 10-9 Torr this configuration allows for simple precision motion control. The LRQ family of linear stage was a good candidate for this specific application, but other linear stages may also be appropriate depending on requirements.