X-DMA-AEZ Series

Objective nanopositioning stage with built-in controller

Series Specifications

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Accuracy (unidirectional) 8 µm (0.000315")
Repeatability < 0.05 µm (< 0.000002")
Minimum Incremental Move 10 nm
Flatness of Travel < 3 µm (< 0.000118")
Straightness of Travel < 3 µm (< 0.000118")
Pitch Error 0.01° (0.174 mrad)
Roll Error 0.005° (0.087 mrad)
Yaw Error 0.005° (0.087 mrad)
Peak Thrust 15 N (3.4 lb)
Maximum Continuous Thrust 5 N (1.1 lb)
Maximum Moment (Pitch) 3 N⋅m (2.2 lb⋅ft)
Maximum Moment (Roll) 10 N⋅m (7.38 lb⋅ft)
Maximum Moment (Yaw) 3 N⋅m (2.214 lb⋅ft)
Stiffness (Pitch) 180 N⋅m/° (97 µrad/N⋅m)
Stiffness (Roll) 320 N⋅m/° (55 µrad/N⋅m)
Stiffness (Yaw) 135 N⋅m/° (129 µrad/N⋅m)
Counterbalance Payload Range 2.5-10 N (0.6-2.2 lb)
Motor Type Moving Magnet Voice Coil
Force Constant 2.26 N/A (0.5 lbs/A)
Counterbalance Type Adjustable Magnetic
Guide Type Anti-Creep Crossed-Roller Bearing
Mounting Interface M3 and M6 threaded holes
Moving Mass 0.175 kg (0.385 lbs)

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X-DMATravel: 10Forcer Size: A-Encoder Options: AE55Counterbalance Options: ZJ2I/O Options: T17, not selected
Showing 2 of 2 parts.

Travel

10
10 mm

Forcer Size

A
Smallest

Encoder Options

AE55
Analog encoder, measure down to 1 nm

Counterbalance Options

ZJ2
Medium force adjustable magnetic counterbalance

I/O Options

Part Specifications Comparison

Part NumberEncoder Output Type
X-DMA10A-AE55ZJ2T17No
X-DMA10A-AE55ZJ2T17QInterpolated relative quadrature signal with differential RS422 levels

Specification Charts & Notes

Other

X-DMA10A-AE55ZJ2T17 - Typical Force Constant Over Travel

Typical Accuracy

X-DMA10A-AE55ZJ2T17 - Typical Accuracy

Minimum Incremental Move

X-DMA10A-AE55ZJ2T17 - Typical Minimum Incremental Move