Automated Positioning for Complex Sample Characterization

The Challenge:

In semiconductor inspection and materials science , performing Raman spectroscopy on large or irregularly shaped samples present a primary hurdle: maintaining orthogonality. This is especially challenging when capturing features from multiple angles including such as when inspecting the angled sidewalls of micro-features. Traditional microscope setups fail here for two reasons:

• Insufficient Clearance: Fixed-frame microscopes lack the vertical space to accommodate large samples when they are angled to view the sides of components.
• Limited Maneuverability: Standard XY stages cannot provide the pitch, roll, and rotation needed to dynamically tilt and rotate the sample so the camera and laser can access all sides of the features.
Consequently, researchers are often forced to choose between degraded data quality or destructive sectioning of the sample to make it fit.

The Outcome:

A system that ensures the laser beam can reach any side of a sample by combining:

• Vertical Clearance: The imaging core is mounted on an extended column, creating a large "open volume" to accommodate tilting the sample.
• Total Surface Access: Rather than just moving left-to-right (XY), the platform uses a multi-axis stack to pitch, roll, and rotate the sample.

The Engineering Approach:

Rather than building a costly, ground-up custom machine, Zaber utilized a modular design using off-the-shelf motorized stages. This approach ensures high performance without the lead times or expense of bespoke manufacturing.

The 6-DoF capability is achieved by layering standard Zaber modules and controlled by Zaber's universal software:

• Imaging: An MKR microscope core with a 25 mm focus stage, mounted to an MTR500A extended column for maximum clearance.
• Positioning: An X-ASR100 XY stage serves as the base, supporting an X-RSM rotary stage and two X-GSM goniometers for tip/tilt (pitch and roll) control.
  Simplified Integration:
  The build is powered by Zaber’s integrated control architecture, which eliminates cluttered external hardware:
• Single-Cable Setup: Every stage features a built-in controller and driver. Units daisy-chain together to share power and data, requiring only a single cable to the computer.
• Universal Software: Motion is managed via the open-source API. In this case, a Python routine fully orchestrates the complex, multi-angle revolutionary scan sequences enabling the collection of thousands of data points seamlessly.
• Hardware Sync: Built-in TTL I/O on the stages allows for direct, seamless triggering of third-party Raman hardware.

Our product customization team is able to complete most customizations within a two-week period. Contact us with your requests.