X-LRQ-E Series: Closed-loop stages with built-in stepper motors, motor encoders, and controllers
Ultra High Vacuum, Motorized Linear Bellows Stage
This X-LRQ-EC is mated to a 2.75 inch conflat, edge welded bellows. The combination allows for 100 mm of linear travel in an ultra high vacuum (UHV) environment. Reaching pressures as low as 10-9 Torr this configuration allows for simple precision motion control.