- Vacuum compatible to 10-3 Torr
- 75, 150, 300, 450, 600 mm travel
- 100 kg load capacity
- Up to 205 mm/s speed and up to 100 N thrust
- Built-in controller; daisy-chains with other Zaber products
- Only 4 feedthrough wires required to control all units in the daisy-chain via serial port (with an X-PIB adaptor)
- Custom versions available
For more information about the basics of a vacuum system and considerations to keep in mind when gathering requirements for your application, read our technical article, "Motion Device Design Considerations for Vacuum Applications".
Zaber's X-LRQ-SV1 Series devices are low-vacuum, computer-controlled, motorized linear stages with high stiffness, load, and lifetime capabilities in a compact size. They are stand-alone units requiring only a standard 24 V or 48 V power supply.
These stages connect to the RS-232 port or USB port of any computer, and they can be daisy-chained with any other Zaber products. The daisy-chain also shares power, making it possible for multiple X-Series products to share a single power supply.
At only 36 mm high, these vacuum stages are excellent for applications where a low profile is required. The X-LRQ-SV1's innovative design allows speeds up to 205 mm/s and loads up to 100 kg. Like all of Zaber's products, the X-LRQ-SV1 Series is designed to be 'plug and play' and very easy to set up and operate. These stages can bolt together into an XY system.
Specification Charts and Notes
Thrust or torque is a function of speed. The values given above are maximums. These values cannot both be achieved simultaneously (i.e. at maximum speed, the unit will not produce maximum thrust).